The invention discloses a cleaning method applicable to components with surface adhesion substance being Ceramic. The method comprises the following steps of 1, conducting chemical cleaning, wherein soaking treatment is conducted on a workpiece through an ammonium hydroxide and hydrogen peroxide solution, wherein the adopted ammonium hydroxide and hydrogen peroxide solution is prepared from H2O2,H2O and NH4OH according to the volume ratio of (2.5-3.5): (3.5-4.5): (0.5-1.5); 2, rinsing the workpiece through pure water; 3, conducting a neutralization reaction through nitric-fluoric acid, wherein the adopted nitric-fluoric acid is prepared from nitric acid and hydrofluoric acid, and the volume ratio of HNO3 to HF to H2O is (17-23): (0.5-1.5): (17-23); 4, conducting wiping; 5, soaking the workpiece in DIWater for 10 minutes or above at the normal temperature; 6, conducting a workpiece surface PH test; 7,conducting ultrasonic oscillation cleaning; 8, conducting a workpiece surface PH test;9, conducting CDA blowing; 10, conducting ultrasonic oscillation cleaning; 11, conducting heating and drying; and 12, conducting natural cooling.