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Isosoluble electric ion generator

An ionizer, soluble technology, applied in the direction of plasma, instruments, electrical components, etc., can solve the problem of unstable discharge voltage of the plasma generator, and achieve the effect of increasing density, facilitating bombardment, and promoting physical bombardment.

Inactive Publication Date: 2019-05-24
河南先途智能科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The object of the present invention is: the present invention provides a kind of isotropic electric ion generator, solves the problem that the discharge voltage of existing plasma generator is not stable

Method used

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Examples

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Embodiment 1

[0036] The embodiment of the present invention provides an isotropic ion generator, including a discharge circuit, a vacuum device and a gas source device, and the discharge circuit includes a multi-electrode, a ground electrode 5 and a constant output power supply 4, such as figure 1 shown;

[0037] see power supply figure 2 The schematic structural diagram of the power supply shown includes a high-voltage package 10 and a self-feedback voltage stabilization circuit 11 , wherein the high-voltage package 10 is connected to the self-feedback voltage stabilization circuit 11 .

[0038] The above-mentioned high-voltage package, that is, the output transformer, also called the reverse transformer, contains low-voltage and high-voltage windings, which can boost the input current, and then rectify it into high-voltage direct current through multiple diodes and capacitors. The specific structure and principle of the high voltage pack belong to the prior art, and will not be repeate...

Embodiment 2

[0051] Based on Example 1, the multi-electrodes include N external electrodes 1 and N internal electrodes 2, gas channels 3 are formed between the external electrodes 1 and internal electrodes 2, N>=2, external electrodes 1, constant output power supply 4 and internal electrodes The electrodes 2 are connected in turn to form a loop, one end of the ground electrode 5 is connected to the constant output power supply 4, and the other end is connected to the external electrode 1, as Figure 5 The circuit connection shown uses multi-electrode dielectric barrier discharge, which is beneficial to generate more high-energy electrons, etc., increases the density of the plasma, promotes the physical bombardment of high-energy electrons, and improves the cleaning effect.

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Abstract

The invention provides an isosoluble electric ion generator and relates to the field of plasma generators. The isosoluble electric ion generator comprises a discharge circuit, a vacuum device and an air source device, wherein the discharge circuit comprises multiple electrodes, a grounding electrode and a constant-output power supply. The constant-output power supply comprises a high-voltage packand a self-feedback voltage stabilizing circuit. The high-voltage pack is connected with the self-feedback voltage stabilizing circuit, and the self-feedback voltage stabilizing circuit is used for collecting output voltage information of the high-voltage pack and adjusting the output voltage of the high-voltage pack according to the output voltage information. According to the invention, the power supply of the ion generator can control the working state of the power output part in real time through the self-feedback voltage stabilizing circuit, so as to adjust the output voltage of the powersupply and enable the output DC voltage value to be constant, thereby guaranteeing that the output voltage is stable without generating potential difference, providing the power stably, facilitatingthe plasma bombardment, and improving the cleaning effect.

Description

technical field [0001] The invention relates to the field of plasma generators, in particular to an isotropic ion generator. Background technique [0002] Plasma is a state of existence of matter, also known as the fourth state (usually matter exists in three states of solid, liquid, and gas). In the state of plasma, there are electrons in a state of high-speed motion and neutral atoms in an activated state. , molecules and other substances, which maintain an electrically neutral state; in the vacuum chamber, the radio frequency power supply emits light under a certain pressure to generate high-energy disordered plasma, and the plasma bombards the surface of the object to be cleaned to achieve The purpose of cleaning; use a large number of ions and excited state molecules in the plasma. Active particles such as free radicals make physical impacts to knock off the atoms on the surface of the material and remove the original pollutants and impurities on the surface; ions are ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/24G05F1/625
Inventor 王毅
Owner 河南先途智能科技有限公司
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