A two-dimensional grating displacement sensor measuring device
A displacement sensor and measuring device technology, applied in measuring devices, optical devices, instruments, etc., can solve problems such as inability to realize two-dimensional displacement measurement, and achieve the effects of easy integration, reduction of loss of material components, and simple processing.
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[0018] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0019] Such as figure 1 As shown, a two-dimensional grating displacement sensor measuring device includes: ring grating 1, angular displacement measuring head 2, sleeve 3, limit device 4, rotating central axis 5, linear displacement measuring head 6 and grating ruler 7. The ring grating 1 is equipped with an angular displacement probe 2 that can slide along it, and the angular displacement probe 2 is fixed on the grating ruler 7. The other end of the grating ruler 7 is fixed with a sleeve 3, and the sleeve 3 is set on the ring grating 1, so that The grating ruler 7 can drive the angular displacement measuring head 2 and the sleeve 3 to move along the annular grating 1; the limit device 4 and the rotation center shaft 5 are installed at the center of the grating ruler 7, and the right half is equipped with a line that can slide linearly along the grating ruler...
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