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A two-dimensional grating displacement sensor measuring device

A displacement sensor and measuring device technology, applied in measuring devices, optical devices, instruments, etc., can solve problems such as inability to realize two-dimensional displacement measurement, and achieve the effects of easy integration, reduction of loss of material components, and simple processing.

Active Publication Date: 2021-05-04
苏州坐标系光电科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problem that the prior art cannot realize any two-dimensional displacement measurement, the present invention provides a two-dimensional grating displacement sensor measuring device

Method used

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  • A two-dimensional grating displacement sensor measuring device
  • A two-dimensional grating displacement sensor measuring device
  • A two-dimensional grating displacement sensor measuring device

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Embodiment Construction

[0018] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0019] Such as figure 1 As shown, a two-dimensional grating displacement sensor measuring device includes: ring grating 1, angular displacement measuring head 2, sleeve 3, limit device 4, rotating central axis 5, linear displacement measuring head 6 and grating ruler 7. The ring grating 1 is equipped with an angular displacement probe 2 that can slide along it, and the angular displacement probe 2 is fixed on the grating ruler 7. The other end of the grating ruler 7 is fixed with a sleeve 3, and the sleeve 3 is set on the ring grating 1, so that The grating ruler 7 can drive the angular displacement measuring head 2 and the sleeve 3 to move along the annular grating 1; the limit device 4 and the rotation center shaft 5 are installed at the center of the grating ruler 7, and the right half is equipped with a line that can slide linearly along the grating ruler...

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Abstract

A two-dimensional grating displacement sensor measuring device belongs to the field of photoelectric measurement technology. In order to solve the problem that the existing technology cannot realize arbitrary two-dimensional displacement measurement, the device includes: an annular grating, an angular displacement measuring head, a sleeve, a limit device, Rotating central axis, linear displacement measuring head and grating ruler, the angular displacement measuring head which can slide along it is installed on the annular grating, the angular displacement measuring head is fixed on the grating ruler, the other end of the grating ruler is fixed with a sleeve, and the sleeve is set in the ring On the grating, the grating ruler can drive the angular displacement probe and the sleeve to move along the ring grating; the center of the grating ruler is equipped with a limit device and a rotating central axis, and the right half is equipped with a linear displacement probe that can slide linearly along the grating ruler. By improving the grating displacement sensor, the invention makes up for the deficiency that the traditional closed grating cannot be used for two-dimensional displacement measurement, and realizes arbitrary two-dimensional displacement measurement.

Description

technical field [0001] The invention relates to a grating displacement sensor capable of two-dimensional nanoscale displacement measurement, belonging to the technical field of photoelectric measurement. Background technique [0002] In the structure of the closed grating linear displacement sensor, the carriage body restricts the degree of freedom of the grating carriage through rolling bearings, so that it can slide in a certain direction, and uses springs to exert pressure on the carriage, and through the rolling bearings and the main grating. The reliable contact of the guide rail surface ensures the accurate transmission of its signals. The form and structure of this grating line displacement sensor is simple, but it can only measure the displacement along the direction of the grating shape. In fact, most measured trajectories are not always along the direction of the grating shape, so the traditional closed grating line displacement sensor cannot cope with the measure...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
Inventor 高旭李舒航高阳戴宜捷刘依凡张瀚元
Owner 苏州坐标系光电科技有限公司