Two-dimensional raster displacement sensor measuring device
A displacement sensor and measuring device technology, which is applied to measuring devices, optical devices, instruments, etc., can solve problems such as inability to realize two-dimensional displacement measurement, and achieve the effects of easy integration, complex assembly process and simple processing.
Active Publication Date: 2019-06-11
苏州坐标系光电科技有限公司
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Problems solved by technology
[0004] In order to solve the problem that the prior art cannot realize any two-dimensional displacement measurement, the present invention provides a two-dimensional grating displacement sensor measuring device
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[0018] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0019] Such as figure 1 As shown, a two-dimensional grating displacement sensor measuring device includes: ring grating 1, angular displacement measuring head 2, sleeve 3, limit device 4, rotating central axis 5, linear displacement measuring head 6 and grating ruler 7. The ring grating 1 is equipped with an angular displacement probe 2 that can slide along it, and the angular displacement probe 2 is fixed on the grating ruler 7. The other end of the grating ruler 7 is fixed with a sleeve 3, and the sleeve 3 is set on the ring grating 1, so that The grating ruler 7 can drive the angular displacement measuring head 2 and the sleeve 3 to move along the annular grating 1; the limit device 4 and the rotation center shaft 5 are installed at the center of the grating ruler 7, and the right half is equipped with a line that can slide linearly along the grating ruler...
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The invention discloses a two-dimensional raster displacement sensor measuring device, belongs to the technical field of photoelectric measurement, and aims to solve the problem that any two-dimensional displacement measurement cannot be realized in the prior art. The device comprises an annular raster, an angular displacement measuring head, a sleeve, a limiting device, a rotary center shaft, a linear displacement measuring head and a raster ruler, wherein the angular displacement measuring head capable of sliding along the annular raster is arranged on the annular raster; the angular displacement measuring head is fixed on the raster ruler; the sleeve is fixed at the other end of the raster ruler; the sleeve sleeves the annular raster, so that the raster ruler can drive the angular displacement measuring head and the sleeve to move along the annular raster; the limiting device and the rotary central shaft are mounted in the center of the raster ruler; and the linear displacement measuring head capable of linearly sliding along the raster ruler is arranged at the right half part of the raster ruler. By improving a raster displacement sensor, the defect that a traditional closed raster cannot perform two-dimensional displacement measurement is made up for, and any two-dimensional displacement measurement is realized.
Description
technical field [0001] The invention relates to a grating displacement sensor capable of two-dimensional nanoscale displacement measurement, belonging to the technical field of photoelectric measurement. Background technique [0002] In the structure of the closed grating linear displacement sensor, the carriage body restricts the degree of freedom of the grating carriage through rolling bearings, so that it can slide in a certain direction, and uses springs to exert pressure on the carriage, and through the rolling bearings and the main grating. The reliable contact of the guide rail surface ensures the accurate transmission of its signals. The form and structure of this grating line displacement sensor is simple, but it can only measure the displacement along the direction of the grating shape. In fact, most measured trajectories are not always along the direction of the grating shape, so the traditional closed grating line displacement sensor cannot cope with the measure...
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Inventor 高旭李舒航高阳戴宜捷刘依凡张瀚元
Owner 苏州坐标系光电科技有限公司