Electrode parameter design method of electrostatic force balanced type quartz flexible accelerometer

An accelerometer and parameter design technology, applied in the field of spacecraft measurement, can solve the problems of small range, complex structure, unsatisfactory accuracy of quartz flexible accelerometer, etc., and achieve optimal acceleration sensitivity accuracy, output signal resolution and noise level optimal effect

Active Publication Date: 2019-10-08
BEIJING INST OF CONTROL ENG
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Problems solved by technology

The accuracy of the existing liquid-floating pendulum accelerometers and quartz flexible accelerometers used in aerospace cannot meet the requirements of this task
The electrostatic levitation accelerometer can achieve ultra-high precision, but its structure is complex and the range is extremely small, so there is no precedent for navigation sensors

Method used

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  • Electrode parameter design method of electrostatic force balanced type quartz flexible accelerometer
  • Electrode parameter design method of electrostatic force balanced type quartz flexible accelerometer
  • Electrode parameter design method of electrostatic force balanced type quartz flexible accelerometer

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Embodiment Construction

[0030] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0031] A method for designing electrode parameters of an electrostatic force balance type quartz flexible accelerometer, such as figure 1 shown, including the following steps:

[0032] (1) The index requirements of the known accelerometer, including the range a m and precision a a ;

[0033] (2) According to the requirements of the accelerometer index, the circuit-related parameter design has been completed, including the capacitance detection resolution C sr , full-scale drive voltage V om ;

[0034] (3) According to the requirements of the accelerometer index, the parameter design of the sensitive pendulum has been completed, including the mass m of the pendulum, the stiffness k of the sensitive direction of the pendulum, and th...

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Abstract

The invention relates to an electrode parameter design method of an electrostatic force balanced type quartz flexible accelerometer. After that design requirements for the range and precision of the accelerometer are made clear, the basic structure of a sensitive pendulous reed and basis parameters of a circuit are designed. Parameters of driving and detecting electrodes of the accelerometer can be designed via the method, and a design result satisfies design indexes of the range and precision of the accelerometer. The method based on an electrostatic driving force relation and a detection capacitance relation is simple, easy and effective.

Description

technical field [0001] The invention relates to an electrode parameter design method of an electrostatic force balance type quartz flexible accelerometer, which belongs to the technical field of spacecraft measurement. Background technique [0002] In spacecraft autonomous control tasks, sensitive 10 -7 g~10 -8 acceleration of g. The accuracy of the existing liquid-floating pendulum accelerometers and quartz flexible accelerometers used in aerospace cannot meet the requirements of this task. The electrostatic levitation accelerometer can achieve ultra-high precision, but its structure is complex and the range is extremely small, so there is no precedent for navigation sensors. [0003] The electrostatic force balance quartz flexible accelerometer combines the advantages of an integrated electrostatic levitation accelerometer and adapts to pendulum acceleration. The accelerometer uses electrostatic force to realize the force feedback closed loop, which replaces the electr...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): G01P15/08G01P21/00
CPCG01P15/08G01P21/00
Inventor刘燕锋刘吉利马官营
OwnerBEIJING INST OF CONTROL ENG