6 results about "Electrostatic levitation" patented technology

The invention relates to the technical field of semiconductor manufacturing equipment, and particularly provides a non-contact electrostatic suspension supporting system and method. A suspension electrode; an inert gas supply assembly; a temperature monitoring assembly; and the controller is used for applying a first preset alternating current voltage to the suspension electrode after the wafer to be processed is placed on the suspension electrode so as to generate an electric field between the wafer to be processed and the suspension electrode and enable the wafer to be processed to float, and then controlling the inert gas supply assembly to supply inert gas with preset flow to each gas outlet, the temperature monitoring assembly is used for monitoring the temperature of the wafer to be processed so as to form a fluid isolation layer between the wafer and the suspension electrode, and is also used for acquiring real-time temperature distribution information of the wafer to be processed by using the temperature monitoring assembly in the process execution process and adjusting the inert gas flow of the gas outlet according to the deviation between the real-time temperature distribution information and the preset target temperature; the system can effectively avoid metal ion pollution, particle pollution and thermal stress damage caused by a traditional supporting mode.

The application belongs to the technical field of plasma plume diagnosis of electric thrusters, and relates to a multi-mode TOF probe system for pulse plume velocity measurement of electric thrusters, which is a kind of diagnosis technology for the pulse plume generated by a pulse plasma thruster. The TOF probe system can realize several different working modes, and can measure the velocities of different components of the pulse plasma plume. The probe loop current signal is realized by using an indirect measurement technology, so that the problems of electrostatic suspension and isolation in the direct current measurement technology can be avoided.

The application relates to the technical field of space material science experiments, and discloses a self-adaptive control method, system and equipment for electrostatic suspension experiments of a space station. The method comprises the following steps: acquiring a real-time position of a sample and a real-time speed of the sample through image acquisition and processing; determining a position deviation between an actual position of the sample and a target control position according to the real-time position of the sample; determining a control voltage reference value by using a PID algorithm based on the position deviation; determining a sample charge polarity change condition according to the position deviation and the real-time speed of the sample; and dynamically adjusting an electrode voltage according to the sample charge polarity change condition and the control voltage reference value, so as to ensure stable suspension of the sample in a heating process. Through multi-dimensional determination based on the sample position and the speed, the application autonomously identifies sample charge polarity inversion, automatically changes the voltage polarity according to the sample charge polarity change, realizes real-time response to sample charge polarity mutation, and ensures stable suspension control in a microgravity environment.

The application relates to the technical field of semiconductor manufacturing equipment, and particularly provides a non-contact electrostatic suspension support system and method. The system comprises a process chamber, a suspension electrode, an inert gas supply assembly, a temperature monitoring assembly and a controller. After a wafer to be processed is placed on the suspension electrode, the controller applies a first preset alternating voltage to the suspension electrode to generate an electric field between the wafer to be processed and the suspension electrode and make the wafer to be processed float, then controls the inert gas supply assembly to supply a preset flow of inert gas to each gas outlet to form a fluid isolation layer between the wafer and the suspension electrode, and during process execution, the controller acquires real-time temperature distribution information of the wafer to be processed by using the temperature monitoring assembly, and adjusts the inert gas flow of the gas outlet according to the deviation between the real-time temperature distribution information and a preset target temperature. The system can effectively avoid metal ion pollution, particle pollution and thermal stress damage caused by a traditional support mode.

The invention relates to the technical field of space material scientific experiments, and discloses a self-adaptive control method, system and equipment for a space station electrostatic suspension experiment. The method comprises the following steps: acquiring a real-time position and a real-time speed of a sample through image acquisition and processing; determining the position deviation between the actual position of the sample and the target control position according to the real-time position of the sample; determining a control voltage reference value by using a PID algorithm based on the position deviation; determining a sample charge polarity change condition according to the position deviation and the sample real-time speed; the electrode voltage is dynamically adjusted according to the sample charge polarity change condition and the control voltage reference value, and stable suspension of the sample in the heating process is ensured. According to the invention, through multi-dimensional determination based on sample position and speed, sample charge polarity inversion is autonomously identified, voltage polarity is automatically changed according to sample charge polarity change, real-time response to sample charge polarity mutation is realized, and stable suspension control in a microgravity environment is ensured.

The present application relates to a kind of monochromatic infrared temperature calibration methods for space station electrostatic suspension experiment, existing temperature data are calibrated in combination with characteristic temperature, can obtain corrected monochromatic infrared emissivity and calibrated temperature, solve the monochromatic infrared temperature calibration problem obtained in space station electrostatic suspension containerless experiment.In addition, for the problem that monochromatic infrared emissivity is difficult to quickly and accurately adjust in space station electrostatic suspension containerless experiment, the method proposed in the present application helps to realize the quick calibration of monochromatic infrared emissivity in space station electrostatic suspension containerless experiment, improves the efficiency of space station electrostatic suspension containerless experiment.The present application can quickly determine monochromatic infrared emissivity without the aid of thermocouple, avoids the failure problem of thermocouple in electrostatic field, for quickly and accurately obtaining the temperature variation of space station electrostatic suspension containerless experiment.The present application is suitable for the calibration of monochromatic infrared temperature in high temperature environment, and the calibrated monochromatic infrared temperature is in the small error range of characteristic temperature.