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Static suspension six-axis micro accelerometer and manufacturing method thereof

A micro-accelerometer, electrostatic levitation technology, applied in the direction of measuring acceleration, velocity/acceleration/impact measurement, manufacturing microstructure devices, etc., can solve the problems of high manufacturing cost, high processing equipment cost, complex process, etc. Sensitivity, small device damage, and low temperature effects

Inactive Publication Date: 2011-11-23
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The process of this manufacturing method is more complicated, the manufacturing cost is higher, and the flexibility is not strong.
The main reason is that the silicon-glass anode bonding process must be carried out at a high voltage of 1000-1200V and a high temperature of 300-400 degrees Celsius. layer to release the mass block, making the process more complicated
And the processing equipment cost of ICPDRIE process is higher
In addition, the above-mentioned silicon-glass anode bonding process limits the suspended mass to silicon material, because the density of silicon is 2.7g / cm 3 Smaller, compared to metals such as nickel, copper, gold and other masses, the detection sensitivity of silicon micro accelerometers is lower

Method used

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  • Static suspension six-axis micro accelerometer and manufacturing method thereof
  • Static suspension six-axis micro accelerometer and manufacturing method thereof
  • Static suspension six-axis micro accelerometer and manufacturing method thereof

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Experimental program
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Effect test

Embodiment 1

[0059] Such as figure 1 , figure 2 As shown, this embodiment adopts a sandwich-type three-layer bonded structure: a lower stator 1 , a suspended sensitive mass 2 with a square plate structure, and an upper stator 3 .

[0060] Such as figure 1 , figure 2 As shown, thin-film metal axial electrodes 11, axial stoppers 13, thick metal structures 14-17 and lead wires are arranged on the lower stator 1, wherein the thin-film metal electrodes include axial suspension control electrode pairs arranged along the X-axis 11a, 11b and 11e, 11f, the axial suspension control electrode pairs 11e, 11d and 11g, 11h arranged along the Y axis, and the center is a circular common electrode 12; set between the pairs of adjacent axial suspension control electrodes There are four axial stop posts 13 above the plane of the membrane electrode. The thick metal structure includes lateral electrodes 14, lateral stoppers 17, pins 15 and upper pole plate lead posts 16, wherein: the upper pole plate lea...

Embodiment 2

[0063] Such as image 3 Shown is another embodiment of the electrostatic levitation six-axis micro accelerometer of this embodiment. It also adopts a sandwich-type three-layer bonding structure, which is composed of a lower stator 1, a square sensitive mass 2 and an upper stator 3 respectively. In this embodiment, the square sensitive mass 2 is a square-shaped structure with square hollow holes 21 at its four corners. Same as the first embodiment, the stator structure also includes thin-film metal electrodes, stoppers, thick metal structures and leads; corresponding to the square-shaped mass block, the different structures are mainly thin-film electrodes and lateral electrodes. That is, the inner lateral electrodes are mainly arranged in the four square holes of the square-shaped mass block to improve the lateral displacement detection sensitivity of the suspended mass block. image 3 Only the structure of electrodes and stoppers are drawn in the figure.

[0064] Such as ...

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Abstract

The invention relates to a static suspension six-axis micro accelerometer and a manufacturing method thereof. The micro accelerometer has a sandwich type three-layer bonding structure which consists of a lower stator, a suspension mass block and an upper stator, wherein in the upper stator in the lower stator, glass is used as a substrate; the suspension mass block is positioned in a bonding cavity between the upper stator and the lower stator; the suspension mass block is positioned in the center of the bonding cavity and does not contact the upper stator or the lower stator to translate along the X axis, Y axis and Z axis or rotate on the X axis, Y axis and Z axis; and the center of the suspension mass block is an original point O of an inertia coordinate system OXYZ, and the OZ direction is perpendicular to a plane on which the upper stator and the lower stator are positioned. The static suspension micro accelerometer which is provided with the square mass block, has a six-axis acceleration measuring function and is high in sensitivity is manufactured on the basis of a non-silicon micro-electromechanical system (MEMS) process. The method is easy, convenient, flexible and low inmanufacturing cost.

Description

technical field [0001] The invention relates to a device and a method in the technical field of micro-electromechanical systems, in particular to an electrostatic levitation six-axis micro-accelerometer and a manufacturing method thereof. Background technique [0002] The electrostatic suspension micro-acceleration sensor is different from the general micro-mechanical acceleration sensor with support beams. It adopts the electrostatic suspension method so that there is no mechanical connection between the detection mass and the upper and lower stators, which greatly reduces the thermal noise of the sensor and improves the resolution and accuracy of the accelerometer. sensitivity. It is manufactured by MEMS micro-machining technology, and uses micro-capacitance detection technology to measure the changing capacitance between the suspended mass and the electrode, and obtains the three-axis acceleration and three-axis angular acceleration after signal processing. [0003] Afte...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125B81C1/00
Inventor 崔峰万镇陈文元张卫平吴校生刘武
Owner SHANGHAI JIAO TONG UNIV
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