Micro gyro driven by static suspension corona to rotate

Abstract

The invention relates to a micro gyro driven by static suspension corona to rotate. The micro gyro comprises upper and lower stators, a micro rotor and a peripheral structure which form a cage structure, and the rotor is arranged in the middle of the cage structure. The stators comprise rotary axial suspension and detection electrodes and public electrodes and are fixedly connected to a substrate; and because of the action of electrostatic force, the micro rotor suspends between the upper and lower stators and has an annular shape, the inside of the micro rotor has tooth-shaped electrodes, while the outside is distributed with a surrounding structure which is radial suspension detection electrodes. The micro gyro has simple structure, provides a corona driving rotary structure, does not need to arrange rotary electrodes on the stators, and can realize the rotation of the rotor at constant high speed without detecting rotating speed. Suspension control of the rotor and position detection can be realized through axial and radial suspension detection electrodes. The micro gyro is made by adopting MEMS micromachining, is easy to implement, and has the characteristics of small size, light weight, low cost, high precision and low power consumption.

Description

technical field [0001] The invention relates to a micro-gyroscope in the field of micro-electromechanical technology (MEMS), in particular to an electrostatic levitation corona-driven rotating micro-gyroscope. Background technique [0002] MEMS devices have the characteristics of miniaturization, low cost, low power consumption, and mass production. In recent years, scholars and engineers from various countries have tried to manufacture suspended rotor MEMS micro gyroscopes. [0003] After searching the literature, it was found that the US patent "acceleration-detecting type gyro and manufacturing method thereof" (patent No. 5920983) mentioned a kind of static electricity of a suspended rotor that can simultaneously measure two-axis angular velocity and three-axis acceleration. The micro-gyroscope adopts glass-silicon-glass bond and structure, the stator is formed by manufacturing electrodes on the glass, and silicon acts as a connection. The rotor is made of monocrystallin...

AI Technical Summary

Problems solved by technology

[0004] This technology has the following disadvantages. Since the radial recovery control force of the above-mentioned comb electrodes on the rotor is much smaller than the suspension control force on the rotor axial direction, the control accuracy and sensitivity of the rotor radial direction of the gyroscope described in this patent are lower. Lower than the axial; due to the use of variable capacitors to make the rotor rotate at high speed, there must be separate electrodes or land areas equivalent to electrodes on the stator and rotor, and the structure is complex

At the same time, in order to ensure the constant high-speed rotation of the rotor, it is necessary to detect the relative position of the stator and rotor in real time and determine the voltage application sequence of the sub-electrodes. There must be a special constant high-speed detection and control circuit, which is complicated to control.

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