Online measurement device of gas partial pressure and online measurement method thereof
A measuring device and technology of gas partial pressure, applied in the field of measurement, can solve the problems of inaccurate measurement results and insufficient sensitivity, and achieve the effects of avoiding cross-contamination, ensuring accuracy, and avoiding interference
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[0042]Exemplary embodiments of the present disclosure will be described in more detail below based on examples. Although exemplary embodiments of the present disclosure have been shown in the specification, it should be understood that the present disclosure can be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.
[0043] Such as figure 1 As shown, the present invention proposes an online measurement and calibration device for gas partial pressure, which includes a vacuum chamber, a sampling channel, a nitrogen filling channel, an air pump group, a mass spectrometry module, a valve assembly and a data acquisition control module. Among them, there are four vacuum chambers, which are the gas source chamber to be tested 101, the calibration gas source chamber 1...
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