Quartz rod butt joint table

Abstract

The invention relates to a quartz rod butt joint table which comprises a base.. The table comprises a first mounting table, wherein the lower surface of the first mounting table is connected with thebase and first mounting table can slide in the first horizontal direction relative to the base, the upper surface of the first mounting table is connected with the lower end of a first elastic element, and the upper end of the first elastic element is used for being connected with a first quartz rod; a second mounting table, wherein the lower surface of the table is connected with the base; the upper surface of the second mounting table is connected with the lower end of a second elastic element, the upper end of the second elastic element is used for being connected with a second quartz rod,the second mounting table and the first mounting table are adjacently arranged in the first horizontal direction, and one end of the first quartz rod faces the second quartz rod. Edge breakage probability in the quartz rod butt joint process can be reduced, and the butt joint quality of the quartz rods and the light homogenizing effect of the quartz rods are guaranteed.

Description

technical field [0001] The invention relates to the technical field of photolithography, in particular to a docking platform for quartz rods. Background technique [0002] A photolithography system usually includes an illumination system, a reticle containing a circuit pattern, a projection system, and a silicon wafer for coating photoresist and a silicon wafer alignment table. The image of the template circuit diagram is projected onto the wafer, so that the circuit diagram on the reticle can be obtained after the wafer is etched. In order to ensure the quality of lithography, it is required that the light intensity distribution in the illumination field of view of the illumination system be uniform. [0003] In the lighting system, the main function of the quartz rod is to reflect the light beam emitted by the light source multiple times to obtain a uniform light beam. The dodging effect of the quartz rod is related to the coherence factor of the lighting system. When th...

AI Technical Summary

Problems solved by technology

However, due to the long required length and high precision of quartz rods, it is difficult to process the whole rod under existing conditions. Two or more quartz rods are usually spliced ​​to obtain the required length of quartz rods.

[0004] During the processing of quartz rods, due to the influence of machining accuracy, it is difficult to achieve absolute perpendicularity between the end edge and the side edge, and because the quartz rod is a brittle material and the docking process is rigid contact, when the docking process occurs, a When the butt end face of the quartz rod is in contact with the side edge of another quartz rod, the quartz rod is prone to edge chipping, and even a very small edge chipping will have a great impact on the uniform light effect of the quartz rod, thereby reducing the quality of the quartz rod. Excellent dodging quality and light uniformity of the lighting system

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