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Acceleration sensor and preparation method thereof

An acceleration sensor and silicon substrate technology, applied in the field of sensors, can solve the problem of low acceleration orientation

Active Publication Date: 2020-04-10
QINGDAO GOERTEK INTELLIGENT SENSOR CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The main purpose of the present invention is to provide an acceleration sensor and its preparation method, aiming to solve the problem that the acceleration orientation measured by the acceleration sensor is less

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  • Acceleration sensor and preparation method thereof
  • Acceleration sensor and preparation method thereof

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Embodiment Construction

[0044] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0045] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relationship between the components in a certain posture (as shown in the accompanying drawings). Relative positional relationship, movement conditions, etc., if the specific posture changes, the directional indication will also change accordingly.

[0046] In addition, in t...

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Abstract

The invention discloses an acceleration sensor, and the acceleration sensor comprises a housing which forms an accommodation cavity in an enclosing manner, and is made of silicon; a detection assemblywhich is arranged in an accommodating cavity and comprises mass blocks, supporting rods and coupling pieces, the mass blocks are connected to the bottom walls of the accommodating cavity through thesupporting rods, the coupling pieces are arranged on the bottom walls of the accommodating cavity in a protruding mode, the coupling pieces are arranged around the mass blocks in a wrapping mode, andthe widths of gaps formed between the mass blocks are equal everywhere; the supporting rods are an elastic piece, and the elastic pieces deform under the action of external force so that the mass blocks can move in the horizontal direction. The mass blocks are polygonal or circular, the number of edges of the mass blocks is larger than four, and the detection assembly is made of boron-doped silicon. The invention also discloses a preparation method of the acceleration sensor. The acceleration sensor disclosed by the invention can detect the acceleration in 360-degree orientation or can detectthe acceleration in more than four orientations.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to an acceleration sensor and a preparation method thereof. Background technique [0002] An acceleration sensor is a sensor that measures the acceleration of an object when it is moving. For example, on-board acceleration sensors can help people judge the running status of the car and prevent traffic accidents. In recent years, with the popularization and development of transportation tools (such as balance cars, shared bicycles, battery cars, etc.), on the one hand, the demand for vehicle-mounted acceleration sensors has increased year by year, and on the other hand, the technical performance requirements for acceleration sensors are more diverse. [0003] In exemplary technologies, acceleration sensors mainly include single-axis and dual-axis. A single-axis acceleration sensor can only measure a single direction, that is, the horizontal direction. If the object does not move al...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/00
CPCG01P15/00
Inventor 王德信吴海鸿陶源王伟
Owner QINGDAO GOERTEK INTELLIGENT SENSOR CO LTD