A Method for Obtaining Optical Surface Errors of Mirrors Under Multi-physics Field Coupling

Abstract

The invention provides a method for acquiring an optical surface error of a reflector under a multi-physical field coupling effect. Firstly, a vector height reference point is defined, and the characteristic that the initial vector height amount of the center of the optical surface of the reflector is always kept unchanged under the condition of loading constraint conditions is utilized; the vector height before any discrete point deformation and the equivalent vector height after any discrete point deformation are used; therefore, the real deformation amount of any discrete point in the vector height direction after deformation is obtained, the accurate reflector optical surface error can be obtained through the real deformation amount, the analysis and calculation accuracy of the opticalsurface error is improved, and errors or untrusted results are avoided. Secondly, all corrected discrete point coordinate values of the optical surface are obtained in finite element software, and the obtaining precision of optical surface errors is improved.

Description

technical field [0001] The invention relates to a method for acquiring optical surface errors of reflectors, in particular to a method for acquiring optical surface errors of reflectors under the coupling action of multiple physical fields. Background technique [0002] For high-performance optical systems (ie, imaging systems and non-imaging systems), in order to obtain high-quality imaging quality or precise pointing accuracy, it is necessary to ensure that the optical components meet stringent surface error requirements. Surface error is usually divided into surface type error and surface position error. The surface shape error takes the wavelength as a reference, and it is usually strictly required that its variation under the action of various physical fields is a fraction of the wavelength; while the surface position error is often reflected by the displacement of a rigid body, and its magnitude is also required to be within microns and microns. Radian level. [0003...

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Problems solved by technology

[0006] In order to solve the problem that the accuracy of the obtained surface error results is reduced or even wrong, and the existing method When obtaining the optical surface error of an aspheric mirror, the initial optical surface discretized by the 3D software model in the finite element has a large error, which cannot satisfy the subsequent error analysis problem under the action of multi-physics, thus providing a multi-physics Acquisition method of mirror optical surface error under coupling effect

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