Method for acquiring optical surface error of reflector under multi-physical field coupling effect
An optical surface, multi-physics technology, applied in geometric CAD, design optimization/simulation, etc., can solve problems such as errors, inability to meet error analysis problems, and reduction in the accuracy of surface error results, so as to improve calculation accuracy, avoid errors or The effect of unreliable results
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[0054] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0055] There are two core problems in the existing optical surface error acquisition methods:
[0056] 1. When the mirror is an aspheric mirror, there are errors in the coordinate values of all discrete points on the optical surface.
[0057] Suppose, the standard equation of the aspheric mirror is:
[0058] 2rz=x 2 +y 2 +(1+k) z 2
[0059] In the above formula, r is the radius of curvature, k is the aspheric coefficient, and x, y, z are the coordinate values of discrete points on the optical surface....
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