Driving device for active vibration suppressing of precise platform
A driving device, active technology, applied in vibration suppression adjustment, non-rotation vibration suppression, material selection for piezoelectric devices or electrostrictive devices, etc., can solve problems such as low frequency external vibration interference
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Embodiment 1
[0039] Example 1: Preparation of a precision platform active vibration suppression driving device
[0040] Adopt CN105405964B embodiment 1 to obtain PZT-5H base MFC structure piezoelectric fiber composite material to prepare MFC device, piezoelectric ceramic stack 4, 6 selects PZT-5H equally, according to figure 1 The path vibration suppression driver module 8 and the stack vibration suppression driver module 9 are set, according to image 3 Set the stacking form of the piezoelectric ceramic stack, connect the MFC device, the piezoelectric ceramic stack device with the card collector, controller, and drive power supply, and the acquisition card, drive power supply, and controller are connected to the XPC target through the network cable. The real-time control system is connected to form a precision platform active vibration suppression drive device.
Embodiment 2
[0041] Example 2: Vibration test experiment of active vibration suppression driving device for precision platform:
[0042] The device of Example 1 was attached to the precision vibration platform by 101 glue. When the vibration platform is applied at 100m / s 2 When accelerating, the overall amplitude of the vibration table is 1.55um. The device in Example 1 was energized with 100V to suppress vibration, and the PID control parameters of the controller were adjusted to the optimum. At this time, the overall amplitude of the vibration table dropped to 0.95um, and the amplitude dropped by 38.7%.
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