A device and method for adjusting and controlling the three-dimensional direction intensity of a focused spot

A technology of focusing spot and spot, applied in optics, optical components, laser welding equipment, etc., can solve the problems of unsuitable processing of asymmetric structure, difficult to control the light intensity distribution of focusing spot, etc., to achieve clear position correspondence and improve flexibility , control the effect of simple

CN111596464BActive Publication Date: 2021-10-15HUAZHONG UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2021-10-15

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Abstract

The invention discloses a device and a method for adjusting and controlling the three-dimensional direction intensity of a focused light spot, belonging to the field of laser processing. The device includes: a phase component, a first lens, a second lens and an objective lens; the phase component performs phase modulation on an incident light beam; the first lens and the second lens form a 4f system, and project the modulated light beam onto the front of the objective lens On the focal plane; the objective lens adopts a non-achromat lens to focus the spot, and utilizes the dispersion effect of the lens at different focusing positions to vary the stretching strength of the spot to produce focused spots in different oblique directions. The invention utilizes the dispersion effect of the objective lens to regulate the shape of the focused spot, so that the three-dimensional direction of the light intensity distribution can be adjusted, and is especially suitable for application scenarios that require processing of inclined structures, and can improve the flexibility of the laser processing system.
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Description

technical field

[0001] The invention belongs to the field of laser processing, and more specifically relates to a device and method for adjusting and controlling the three-dimensional direction intensity of a focused spot. Background technique

[0002] In recent years, with the popularity of femtosecond lasers and the development of femtosecond laser processing technology, researchers have discovered many new characteristics and phenomena in femtosecond laser material processing. Compared with conventional continuous lasers and nanosecond laser lamps, femtosecond lasers have extremely high instantaneous power density. After focusing, nonlinear effects such as multi-photon absorption or multi-photon polymerization can be realized inside transparent materials, making three-dimensional laser direct writing Technology has developed rapidly, and a series of new applications have been derived, such as 3D laser printing, multi-dimensional optical storage, and 3D microfluidic chip m...

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Embodiment Construction

[0029] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0030] Since the laser pulse width is inversely proportional to the spectral bandwidth, the spectral width of the femtosecond laser cannot be ignored. The glass material from which the lens is made has dispersion effects that often distort the spot shape when focusing femtosecond laser pulses. Specifically, when focusing on the optical axis, the spectral components of different wavelengths will...