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Wavelength-tunable interference filter

An interference filter, variable technology, applied in instruments, using multiple reflections to generate spectra, optics, etc., can solve the problems of reduced reliability, peeling, and reduced bonding strength of substrates with variable wavelength interference filters.

Active Publication Date: 2020-12-22
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, if the bonding area is shortened, the substrate bonding strength between the first substrate and the second substrate decreases, and there is also a risk of delamination between the first substrate and the second substrate, reducing the reliability of the variable wavelength interference filter.

Method used

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  • Wavelength-tunable interference filter
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  • Wavelength-tunable interference filter

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0030] Next, the first embodiment will be described.

[0031] figure 1 It is a plan view showing a schematic configuration of the variable wavelength interference filter 1 according to the present embodiment. figure 2 is used figure 1 A cross-sectional view of the variable wavelength interference filter 1 cut along line A-A of FIG.

[0032] exist figure 1 and figure 2 Among them, the variable wavelength interference filter 1 includes a light-transmitting first substrate 11, a light-transmitting second substrate 12, a first mirror 21 provided on the first substrate 11, and a second mirror 21 provided on the second substrate 12. Mirror 22. The first substrate 11 and the second substrate 12 are substrates on which the first mirror 21 and the second mirror 22 face each other across the first gap G1 . The variable wavelength interference filter 1 is a Fabry-Perot etalon element that emits light of a predetermined wavelength corresponding to the size of the first gap G1 amon...

no. 2 approach

[0114] Next, a second embodiment will be described.

[0115] In the first embodiment described above, a configuration example in which a single first electrode 31 is provided on the first substrate 11 was shown. On the other hand, this embodiment differs from the first embodiment described above in that two electrodes are provided on the first substrate 11 .

[0116] It should be noted that in the following description, the same symbols are attached to the components already described, and the description thereof will be omitted or simplified.

[0117] Figure 8 It is a plan view showing a schematic configuration of a variable wavelength interference filter 1A according to the second embodiment. Figure 9 It is a cross-sectional view showing a schematic configuration of the vicinity of the diaphragm portion 112 of the variable wavelength interference filter 1A of the second embodiment.

[0118] In this embodiment, if Figure 8 As shown, the first electrode provided on the ...

Deformed example 1

[0139] Although an example in which the diaphragm portion 112 is formed by isotropic etching is shown in the above-described embodiment, it is not limited thereto. Figure 11 is a diagram showing another shape of the diaphragm portion 112 of the first substrate 11 .

[0140] Figure 11 The diaphragm portion 112 is formed by processing the second surface 11B of the first substrate 11 by anisotropic etching. The diaphragm portion 112 has a flat portion 112A, a first inclined portion 112D, and a second inclined portion 112E. The thickness of the first inclined portion 112D in the Z direction gradually increases from the flat portion 112A toward the outer peripheral portion 113 , and the surface on the second surface 11B side becomes an inclined plane. Likewise, the thickness of the second inclined portion 112E in the Z direction gradually increases from the flat portion 112A toward the movable portion 111 , and the surface on the second surface 11B side becomes an inclined plan...

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PUM

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Abstract

The invention provides a wavelength-tunable interference filter that can be reduced in size while suppressing a decrease in reliability. The wavelength-tunable interference filter includes: a first substrate where a first mirror and a first electrode are provided; a second substrate where a second mirror corresponding to the first mirror and a second electrode facing the first electrode are provided; and a bonding part bonding the first substrate and the second substrate together. The first substrate includes a moving part where the first mirror is arranged, a diaphragm part holding the movingpart in such a way that the moving part is movable in the Z-direction, and an outer circumferential part provided outside of the diaphragm part. The diaphragm part includes a planar part having a uniform thickness, and a first slope part having a thickness in the Z-direction incrementing as it goes from the planar part toward the outer circumferential part. The first electrode is provided over arange from the planar part to the first slope part. An outer edge of the first electrode, which is an edge opposite to the first mirror, is located at the first slope part. The bonding part is provided over a range from a part of the first slope part to the outer circumferential part.

Description

technical field [0001] The invention relates to a variable wavelength interference filter. Background technique [0002] Conventionally, there is known a variable-wavelength interference filter (optical filter) in which a pair of mirrors are opposed to each other with an air gap interposed therebetween (for example, refer to Patent Document 1). [0003] The variable wavelength interference filter described in Patent Document 1 is an air-gap type obtained by arranging one of a pair of mirrors on a first substrate and the other of a pair of mirrors on a second substrate. Electrostatically driven standard device. In the variable wavelength interference filter, the first substrate has an annular groove formed on the surface opposite to the surface facing the second substrate. Thus, the thinner part of the second substrate becomes an elastic and deformable diaphragm, and the part surrounded by the diaphragm becomes a movable part where the mirror is arranged, and the movable pa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/00
CPCG02B26/001G01J3/26G02B5/284G02B5/005
Inventor 松野靖史中村友亮
Owner SEIKO EPSON CORP