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Fully buried color filter array of image sensor

An image sensor and color filter array technology, applied in the field of color filters, can solve the problems of occupying a large space and damaging the density of the color filter array

Active Publication Date: 2021-02-23
OMNIVISION TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, these sidewalls can take up a lot of space and compromise the color filter array occupancy density

Method used

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  • Fully buried color filter array of image sensor
  • Fully buried color filter array of image sensor
  • Fully buried color filter array of image sensor

Examples

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Embodiment Construction

[0013] Disclosed herein are examples involving color filter arrays and methods of fabricating the color filter arrays using sacrificial replacement layers. In the following description, numerous specific details are set forth in order to provide a thorough understanding of examples. One skilled in the relevant art will recognize, however, that the techniques described herein may be practiced without one or more of the specific details, or with other methods, components, materials, etc. In other instances, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring certain aspects.

[0014] In this specification, reference to "one example" or "one embodiment" means that a particular feature, structure, or characteristic described in connection with the example is included in at least one example of the present invention. Thus, the appearances of the phrases "in one instance" or "in one embodiment" in various places in this specificat...

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Abstract

The invention relates to a fully buried color filter array of an image sensor. The image sensor includes a substrate. An array of photodiodes is disposed in the substrate. A plurality of spacers is arranged in a spacer pattern. At least one spacer of the plurality of spacers has an aspect ratio of 18:1 or greater. A buffer layer is disposed between the substrate and the spacer pattern. An array ofcolor filters is disposed in the spacer pattern.

Description

technical field [0001] The present invention relates generally to color filters, and more particularly to color filter arrays for image sensors. Background technique [0002] A color image sensor includes a color filter array. Each color filter in the color filter array may only allow light of one color to pass through to the sensor. The color filter array may include sidewalls between two adjacent color filters that isolate each color filter from adjacent color filters of the color filter array. However, these sidewalls may take up a lot of space and compromise the color filter array occupancy density. Contents of the invention [0003] In one aspect, the present application provides an image sensor comprising: a substrate in which a photodiode array is disposed; a plurality of spacers arranged in a spacer pattern, wherein the plurality of spacers At least one of the spacers has an aspect ratio of at least 18:1; a buffer layer disposed between the substrate and the spa...

Claims

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Application Information

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IPC IPC(8): H01L27/146
CPCH01L27/14621H01L27/14623H01L27/1463H01L27/14645H01L27/14683H01L27/14685H01L27/14609G02B5/201G02B3/0056H04N23/54G02B7/006H04N23/55
Inventor 陈刚郑源伟王勤杨存宇陈冠男毛杜立戴森·H·戴L·A·格朗
Owner OMNIVISION TECH INC