Ultra-short-distance metal electrode thermal modulation phase shifter

Abstract

The invention belongs to the field of integrated optical waveguide modulation, and particularly relates to an ultra-short-distance metal electrode thermal modulation phase shifter, which comprises a substrate, and a metal thermode and an optical waveguide which are respectively arranged on the substrate, wherein the metal thermode and the optical waveguide are arranged at a short distance, and thedistance is less than 600nm; and the metal thermode is made of titanium, titanium nitride, aluminum, gold and / or metal with a larger refractive index imaginary part. The method comprises two schemesof lateral heating and top surface heating, in the lateral heating scheme, a thermode is placed on the side surface of a waveguide in parallel at a short distance, and heat is conducted to the opticalwaveguide through a substrate to realize thermal phase shift; in the top surface heating scheme, one auxiliary waveguide is arranged on the side surface of the optical waveguide, the thermode is arranged above the auxiliary waveguide, and heat is conducted to the optical waveguide through the top layer of the substrate to realize thermal phase shift. The astronautic time symmetry principle is utilized, the distance between the thermode and the waveguide is greatly shortened, low-loss and high-speed thermal regulation is achieved, and the astronautic time symmetry principle is compatible withthe CMOS process and is a standard process.

Description

technical field [0001] The invention belongs to the field of integrated optical waveguide modulation, and more specifically relates to an ultra-short-distance metal electrode thermal phase shifter. Background technique [0002] The information explosion has become a serious challenge to the current communication system. In order to deal with the ever-increasing data, many schemes have been proposed. Among them, silicon-based photonics is a very potential solution due to its advantages of high speed, low loss, and high integration. In order to build an on-chip communication system, a modulator is essential. There are many on-chip modulation schemes, such as electro-optic modulation, thermo-optic modulation, and electro-absorption modulation. Among them, thermo-optic modulation has the advantages of low loss, simple implementation, and low energy consumption, and is widely used in various SoCs. [0003] Thermal modulation of light has been widely used in various fields, suc...

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Problems solved by technology

[0004] The invention provides an ultra-short-distance metal electrode thermal phase shifter, which is used to solve the problem of high energy loss and low modulation rate in the existing thermal phase shifter when thermally modulating the optical waveguide, which makes it difficult to meet the growing demand. Technical Issues of Information Processing Requirements

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