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Method and retaining device for producing a micropump with mechanically preloaded membrane actuator

A technology for holding devices, actuators, applied in the direction of pumps with flexible working elements, chemical instruments and methods, mechanical equipment, etc., can solve the problems of error prone, expensive voltage supply and contact

Active Publication Date: 2021-03-23
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] · For large fields (arrays) required for cost-effective manufacturing, voltage supply and contacts are expensive and error-prone

Method used

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  • Method and retaining device for producing a micropump with mechanically preloaded membrane actuator
  • Method and retaining device for producing a micropump with mechanically preloaded membrane actuator
  • Method and retaining device for producing a micropump with mechanically preloaded membrane actuator

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Embodiment Construction

[0039] Hereinafter, embodiments will be described in more detail with reference to the accompanying drawings, in which elements having the same or similar functions are provided with the same reference numerals.

[0040] Additionally, piezoelectric actuators are described herein as non-limiting examples of deflectable diaphragm actuators. Since the deformation or mechanical biasing of the diaphragm actuator according to the invention does not take place primarily by applying an electrical voltage as in the prior art, other types of diaphragm actuators can also be used.

[0041] In addition, the holding device of the present invention is exemplarily referred to as a tool below.

[0042] figure 1 A flow chart of the method of the invention for producing a micropump is shown. Such micropumps include dimensions in the micron range and can be fabricated, for example, in MEMS designs.

[0043] In block 1010, a substrate is provided that includes at least one pump diaphragm for a ...

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PUM

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Abstract

The invention relates to a method for producing a micropump (21). The method has, inter alia, a step of providing a substrate (22), wherein the substrate (22) has at least one pump membrane (27) for the micropump (21). Also provided is a membrane actuator (28) for moving the pump membrane (27), wherein the membrane actuator (28) is arranged in a retaining device (38) according to the invention. The retaining device (38) is oriented with respect to the substrate (22) in such a way that the membrane actuator (28) is arranged facing the pump membrane (27), and the pump membrane (27) is deflectedin the direction of the membrane actuator (28) by means of a fluid pressure (36) that is higher than the ambient pressure. Also, the membrane actuator (28) is secured to the pump membrane (27).

Description

technical field [0001] The invention relates to a method for producing a micropump with a diaphragm actuator, in particular a diaphragm actuator configured as a bending transducer, a holding device for holding the diaphragm actuator during the manufacture of the micropump, and a Diaphragm actuators, in particular micropumps configured as diaphragm actuators of bending transducers. Background technique [0002] Micropumps are very small pumps with dimensions in the micron range. They are manufactured significantly differently than macroscopic pumps. Micropumps can be produced, for example, in MEMS technology. Such micropumps typically include a deflectable diaphragm that can be deflected by a diaphragm actuator. Deflecting the diaphragm produces the stroke of the micropump. Since the diaphragm actuator bends the diaphragm, such a diaphragm actuator may also be referred to as a bending transducer. For example, bending transducers are known which function according to the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B43/04
CPCF04B43/046B01L3/502707B01L3/50273B01L2200/12B23P15/00Y10T29/49236B29C65/4835
Inventor 齐格弗里德·罗尔尤塞尔·康加尔马丁·瓦克勒马丁·里希特克里斯托夫·库特
Owner FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV