Defect detection method, device and computer-readable storage medium
A detection method and detection device technology, which is applied in the direction of measuring devices, calculations, and optical testing of defects/defects, can solve the problems of large gray scale differences, unfavorable accurate detection, and missed detection, so as to reduce the probability of false detection and missed detection Effect
Active Publication Date: 2021-07-20
SKYVERSE TECH CO LTD
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Problems solved by technology
However, in actual industrial production, due to the difference in production process, the gray level difference between wafers is very large, which will inevitably cause the gray level difference between different reference templates and between the reference template and the wafer to be tested.
Therefore, when testing the wafer to be tested, due to the existence of gray scale differences, some defects will be missed, and some will be judged as qualified parts as defects, which is not conducive to accurate detection
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[0047] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.
[0048] In the description of the present invention, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of said features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.
[0049] In the description of the present inventio...
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The invention discloses a defect detection method, device and computer-readable storage medium. A defect detection method, comprising the steps of: 1) acquiring a reference image and an image of a sample to be tested; 2) acquiring a first grayscale average value of a measurement unit of the image of the sample to be tested; 3) Compensating the average gray value of the reference image; 4) comparing the compensated reference image with one of the measurement units of the image of the sample to be tested, and determining the defect of the measurement unit. In the detection method of the above defects, when the same reference image is used for detection of multiple measurement units of the image of the sample to be tested, the gray scale compensation of the reference image can be performed in real time, and the detection speed can be detected with almost no influence. It can detect low-contrast defects and reduce the probability of false detection and missed detection.
Description
technical field [0001] The invention relates to the technical field of sample defects, in particular to a defect detection method, device and computer-readable storage medium. Background technique [0002] In related technologies, in order to detect defects on the surface of a wafer (such as foreign objects, scratches, etc.), a common solution is to first select a qualified wafer or a part thereof as a reference template. During detection, compare each Die on the Wafer to be detected with the corresponding part in the reference template. If the gray scale difference between the two exceeds the preset threshold after comparison, it is considered a defect. However, in actual industrial production, due to the difference in production process, the gray level difference between wafers is very large, which will inevitably cause the gray level difference between different reference templates and between the reference template and the wafer to be tested. . Therefore, when testing ...
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IPC IPC(8): G06T7/00G01N21/88
CPCG01N21/8851G01N2021/8887G06T7/0004G06T7/001
Inventor 陈鲁佟异张嵩
Owner SKYVERSE TECH CO LTD