Dual-mode high-reliability silicon-based filter and manufacturing method thereof

Abstract

The invention discloses a dual-mode high-reliability silicon-based filter and a manufacturing method thereof.The dual-mode high-reliability silicon-based filter comprises a silicon cavity resonance unit, a perturbation silicon pit, an input feeder line groove and an output feeder line groove, and the silicon cavity resonance unit comprises a first metal layer, a thick film layer, a high-resistance silicon dielectric layer and a second metal layer which are sequentially arranged from top to bottom; the perturbation silicon pit is arranged on the high-resistance silicon dielectric layer and located at one corner, and the input feeder line groove and the output feeder line groove are arranged on the first metal layer and located on the two sides of the other corner opposite to the perturbation silicon pit respectively. Through the mode, according to the dual-mode high-reliability silicon-based filter and the manufacturing method thereof, the perturbation silicon pit is etched in the specific position of the high-resistance silicon dielectric layer, and a single resonance frequency point of the silicon cavity resonance unit can be perturbated to generate two resonance frequency points, so that the aim of widening the bandwidth of the filter is fulfilled; the circuit area and the integration of an integrated circuit are reduced, the loss is small, and the reliability is high.

Description

technical field [0001] The invention relates to the field of filters, in particular to a dual-mode high-reliability silicon-based filter and a manufacturing method thereof. Background technique [0002] Filters can pass electrical signals of a certain frequency and block electrical signals of other frequencies. Therefore, filters play an important role in frequency selective filtering in radio frequency and microwave systems. The main performance indicators of filters include insertion loss, bandwidth, out-of-band selectivity, and circuit size. Reducing filter loss, increasing filter bandwidth, and circuit miniaturization have always been difficult points in filter design. [0003] Traditional filters mainly include cavity filters, LC filters and planar filters. Cavity filters are formed by cutting metal as a whole, LC filters are composed of inductors, capacitors and resistors, and planar filters are composed of transmission lines and PCBs. board, there are problems such a...

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Problems solved by technology

[0003] Traditional filters mainly include cavity filters, LC filters and planar filters. Cavity filters are formed by cutting metal as a whole, LC filters are composed of inductors, capacitors and resistors, and planar filters are composed of transmission lines and PCBs. board, there are problems such as large volume, complex structure, poor reliability, etc., which affect the development of the filter in miniaturization and chip, and need to be improved

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