Position detection device
A detection device and technology for electrical signals, applied in measurement devices, optical devices, radio wave measurement systems, etc., can solve problems such as the reduction of SN ratio and the inability to effectively use the input dynamic range of the computing device.
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[0026] Next, an embodiment of the position detection device will be described.
[0027] Such as figure 1 As shown, the position detection device of the present embodiment has a base having a three-layer structure including a lower base 21 , a middle base 22 , and an upper base 23 .
[0028] A light receiving element 24 (a photodiode in this embodiment) for detecting the light intensity of incident light is provided on the lower base 21 . The light receiving element 24 is located on the middle base 22 side of the lower base 21 ( figure 1 The center of the face of the upper side). The light receiving element 24 is disposed in a gap between the lower base 21 and the upper base 23 . The upper base 23 is provided with the lamination direction of the base ( figure 1 The through-hole (small hole 25) that penetrates the upper base portion 23 in the vertical direction). The small hole 25 is formed at a position facing the light receiving portion of the light receiving element 24 ....
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