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Profiling complex surface structures using scanning interferometry

A technology of scanning interference and surface structure, applied in the direction of interferometer, measuring device, optical device, etc., can solve problems such as inconsistency

Active Publication Date: 2010-09-08
ZYGO CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Unfortunately, such an assumption may not hold when applied to test objects with thin films due to reflections from the top surface and underlying film / substrate interface

Method used

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  • Profiling complex surface structures using scanning interferometry
  • Profiling complex surface structures using scanning interferometry
  • Profiling complex surface structures using scanning interferometry

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Embodiment Construction

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Abstract

A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.

Description

Cross References to Related Applications This application claims priority under 35 U.S.C 119(e) to the following U.S. Provisional Patent Application, filed March 6, 2003, and entitled "PROFILING COMPLEX SURFACESTRUCTURES USING HEIGHT SCANNING INTERFEROMETRY PROFILING COMPLEX SURFACESTRUCTURES USING SIGNALS FROM HEIGHT SCANNING INTERFEROMETRY (Using Signals from Height Scanning Interferometry to Form Complex Surface and U.S. Patent Application Serial No. 60 / 452,465; and U.S. Patent Application Serial No. 60 / 452,465, filed January 26, 2004, entitled "SURFACE PROFILING USING AN INTERFERENCE PATTERNMATCHING TEMPLATE," Serial No. US Patent Application 60 / 539,437. It is hereby incorporated by reference in its entirety. technical field The present invention relates to the use of scanning interferometry to measure surfaces of objects having complex surface structures such as thin film(s), discrete structures of dissimilar materials, or discrete structures underresolved by the opti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02G01B11/06G01B11/24G01B11/30
CPCG01B9/02057G01B9/0201G01B9/0209G01B9/02088G01B11/0675G01B2290/70G01B9/02084G01B9/02
Inventor 彼得·J·德格鲁特罗伯特·斯托纳泽维尔·C·德利加
Owner ZYGO CORPORATION