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Vacuum pump

a vacuum pump and vacuum chamber technology, applied in the field of vacuum pumps, can solve the problems of consuming energy, destroying the bearing, and reducing the heat conductivity of the exhaust chamber, so as to achieve excellent heat conductivity, excellent heat conductivity, and excellent heat conductivity

Inactive Publication Date: 2005-11-17
TEIJIN SEIKI CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

"The invention is a vacuum pump with an improved insulating device for reducing heat generation. The insulating device is made of a heat-conducting material that is lower in heat conductivity than the housing of the pump. The insulating device can be a solid or hollow device, and it can be positioned between the vacuum exhaust chamber and the bearing case. The insulating device can be made of a high-conductivity metal or a heat pipe. The invention also includes a heat conducting device made of a high-heat conductivity material, which can be a metal or a heat pipe. The invention helps to protect the vacuum pump from heat damage and ensures efficient insulation."

Problems solved by technology

According to a rotary vacuum pump for making a reactive gas flow of a background art, there poses a problem that a reaction product is piled up at an exhaust path to close the exhaust path of an exhaust port or a problem that the product is adhered to inside of the exhaust chamber, a rotating rotor or the like and the rotor or the like is not rotated.
However, in the case of a rotary vacuum pump having a rotating shaft, when a temperature of a housing forming the exhaust chamber is elevated, there poses a problem that heat is conducted also to a bearing fixed to the housing to elevate a temperature of the bearing and the bearing is destructed by thermal expansion of the bearing or a reduction in hardness thereof.
However, in the case of such a vacuum pump having the rotating shaft of the background art, there poses a problem that by providing the paths for cooling water at vicinities of the bearings in order to cool the bearings to make cooling water flow, also the housing is cooled and therefore, also heat at inside of the exhaust chamber maintained at a high temperature is deprived.
It is necessary to maintain inside of the exhaust chamber at a high temperature in order to prevent the product from being adhered to the housing, the rotor or the like at inside of the exhaust chamber, in order to elevate the temperature at inside of the exhaust chamber while cooling the bearings, it is necessary to supply heat energy of a deprived heat amount or more to the housing by further heating to thereby pose also a problem of being caught in a vicious cycle of increasing also consumed energy.
Further, in the case of the shaft structure having the shaft seals, there is a possibility of posing also a problem of destructing also the shaft seals by heat.

Method used

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Examples

Experimental program
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embodiment 1

[0025] First, an explanation will be given of a constitution of a vacuum pump 100 of the invention in reference to FIG. 1.

[0026] The vacuum pump 100 is provided with screw rotors 101 and 102.

[0027] The screw rotors 101 and 102 are contained in a rotor containing chamber formed at an inner portion of a housing. Describing in details, the screw rotor 101 is rotatably supported by the housing by bearings 104 and 105 and the screw rotor 102 is rotatably supported by the housing by bearings 106 and 107. Shaft seals 112, 113, 114 and 115 are respectively arranged between an exhaust chamber 111 and the bearings 104, 105, 106 and 107 filled with a lubricant for preventing the lubricant of the bearings 104, 105, 106 and 107 from being leaked to contaminate inside of the exhaust chamber by the lubricant and to prevent a foreign matter produced by a reactive gas from invading the bearings 104, 105, 106 and 107 from inside of the housing.

[0028] Further, end portions on one side of the screw ...

second embodiment

[0034] An explanation will be given of an embodiment of other uniformly heating device of the housing as a second embodiment in reference to FIG. 2 and FIG. 3. FIG. 2 shows a section in an axial direction of one screw rotor of a screw type vacuum pump having a pair of screw rotors. Further, FIG. 3 is a sectional view taken along a line A-A of FIG. 2. A screw rotor 251 is rotatbly fixed at inside of a housing 253 via bearings 255 and 257. Numeral 267 designates a suction port, and numeral 269 designates an exhaust port. Numerals 259 and 261 designate insulating members for preventing the bearings 255 and 257 from being destructed by conducting heat at inside the exhaust chamber to vicinities of the bearings 255 and 257. Further, projected portions 263 and 265 are provided at the housing 253 for uniformly heating inside of the exhaust chamber, surfaces thereof are formed to be flat, and metal plates 271 and 273 comprising a metal having an excellent heat conductivity of pure copper, p...

fourth embodiment

[0036] Next, an explanation will be given of other fourth embodiment related to an insulating structure in reference to FIGS. 5(a) and 5(b).

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Abstract

The invention relates to a heat insulation structure having the function of retaining a high temperature in a vacuum exhaust chamber in a rotary type vacuum pump and the function of cooling bearings at the same time, and particularly has for its object the provision of a structure for preventing bearings or shaft seals from becoming so high in temperature as to be damaged when a high temperature is to be retained in an exhaust chamber with respect to a vacuum pump for exhausting reactive gases as in a semiconductor process. As a means to achieve the object, in a vacuum pump comprising an introduction device having a vacuum exhaust chamber and adapted to introduce a process gas into the vacuum exhaust chamber, an exhaust device for exhausting the process gas out of the vacuum exhaust chamber, a housing for separating the vacuum exhaust chamber from outside, with a rotor installed fro rotation in the housing through a bearing, a heat insulation device is provided between the vacuum exhaust chamber and the bearing. Further, a metal whose thermal conductivity is higher than that of the material of the housing is incorporated as a heat transmission device into the housing.

Description

TECHNICAL FIELD [0001] The present invention relates to a structure of protecting a bearing or the like against heat generated at inside of an exhaust chamber of a vacuum pump, particularly relates to a structure of preventing a bearing or a shaft seal from being destructed by elevating a temperature thereof while maintaining an exhaust chamber at a high temperature relative to a vacuum pump for exhausting a reactive gas as in a semiconductor process. BACKGROUND ART [0002] According to a rotary vacuum pump for making a reactive gas flow of a background art, there poses a problem that a reaction product is piled up at an exhaust path to close the exhaust path of an exhaust port or a problem that the product is adhered to inside of the exhaust chamber, a rotating rotor or the like and the rotor or the like is not rotated. In order to resolve the problem, there has been adopted a method of elevating a temperature of inside of the exhaust chamber such that the product is not solidified ...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): F04C18/16F04C29/04
CPCF04C18/16F04C29/04F05C2251/048F05C2225/04F04C2240/10
Inventor MASUSHIGE, EIJIFUJII, SATOSHI
Owner TEIJIN SEIKI CO LTD