Electrostatic ultrasonic transducer, ultrasonic speaker, sound signal reproducing method, ultra directional acoustic system and display device

Inactive Publication Date: 2007-07-05
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0052] This allows an acoustic signal to be reproduced with a sufficient sound pressure and a wide band characteristic so as to be generated from a virtual sound source formed in the vicinity of a sound wave reflec

Problems solved by technology

This is insufficient a little in sound pressure for using the electrostatic ultrasonic transducer as an ultrasonic speaker.
The electrostatic ultrasonic transducer (of the pull type), however, is difficult to achieve the above numerical value.
In the driving method used in the above structure, however, oscillation force does not operate between the respective oscillation holes (an area pressed from the upper and lower sides by the fixed electrodes) in the oscillation film or the oscillation film is not fixed in the area.
This causes a problem that the oscillation film skids in the case that distance between the respective oscillation holes is short.
When the oscillation film goes into such

Method used

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  • Electrostatic ultrasonic transducer, ultrasonic speaker, sound signal reproducing method, ultra directional acoustic system and display device
  • Electrostatic ultrasonic transducer, ultrasonic speaker, sound signal reproducing method, ultra directional acoustic system and display device
  • Electrostatic ultrasonic transducer, ultrasonic speaker, sound signal reproducing method, ultra directional acoustic system and display device

Examples

Experimental program
Comparison scheme
Effect test

Example

[0077] As described above, in the first embodiment shown in FIG. 1, fixing an area other than the oscillation part of the oscillation film 12 by means of electrostatic force allows a mutual independent characteristic of oscillation holes arranged in the shape of an array (an oscillation area of the oscillation film opposed to the through hole 14 of the fixed electrode) to be improved and influence of distortion to be reduced.

[0078] A value of the direct current voltage applied between the oscillation film 12 and the electrodes for fixing 102 and 112 may be adjusted to adjust electrostatic force to be applied between the electrode layer 121 of the oscillation film 12 and the electrodes for fixing 102 and 112 so that the outer circumference of the film oscillation part of the oscillation film 12 is changed from a fixed end to a free end. This allows the film oscillation to be increased.

Example

Second Embodiment

[0079]FIGS. 3A and 3B show an electrostatic ultrasonic transducer in accordance with a second embodiment of the invention. An example shown in FIGS. 3A and 3B is an example of arrangement of the electrodes for fixing 102 and 112, which are provided more closely to the oscillation film 12 than the case of the first embodiment shown in FIGS. 1A to 1C. Such arrangement allows the direct current voltage necessary to fix the electrodes for fixing 102 and 112 and the oscillation film 12 by means of electrostatic force to be made small.

Example

Third Embodiment

[0080] The electrostatic ultrasonic transducer in accordance with the embodiments of the invention can be achieved not only by a push-pull type electrostatic ultrasonic transducer but also by a pull type electrostatic ultrasonic transducer.

[0081]FIGS. 4A, 4B, 4C and 4D show an electrostatic ultrasonic transducer in accordance with a third embodiment of the invention. FIGS. 4A, 4B, 4C and 4D show an example of forming a pull type electrostatic ultrasonic transducer.

[0082]FIG. 4A shows a whole structure of an electrostatic ultrasonic transducer 2. FIG. 4B is a partially enlarged view of FIG. 4A and shows an example of arrangement of an electrode for oscillation and an electrode for fixing. FIG. 4C shows an example of signal connection. FIG. 4D shows a modification of the fixed electrode 11.

[0083] An example shown in FIGS. 4A, 4B, 4C and 4D is an example of a structure in which the upper fixed electrode 10 of the electrostatic ultrasonic transducer 1 shown in FIGS. ...

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Abstract

An electrostatic ultrasonic transducer includes: a first electrode provided with a through hole; a second electrode provided with a through hole forming a pair with the through hole of the first electrode; an oscillation film sandwiched between the pair of electrodes and having an electrode layer wherein a direct current bias voltage is applied to the electrode layer, the oscillation film being driven by applying an alternating current signal between the pair of electrodes and the electrode layer; a holding member for holding the pair of electrodes and the oscillation film; electrode patterns respectively formed by lamination on the first and second electrodes corresponding to plural driving functions; and a controlling unit for carrying out control so that voltage corresponding to a driving condition defining the driving function is applied between the electrode pattern formed by lamination and the electrode layer of the oscillation film.

Description

BACKGROUND [0001] 1. Technical Field [0002] The present invention relates to an electrostatic ultrasonic transducer, particularly, an electrostatic ultrasonic transducer capable of reducing influence of distortion and controlling oscillation of an oscillation film by area, an ultrasonic speaker using the electrostatic ultrasonic transducer, a method of reproducing a sound signal by means of the electrostatic ultrasonic transducer, an ultra directional acoustic system and a display device. [0003] 2. Related Art [0004] An electrostatic ultrasonic: transducer has been usually known as a wide band oscillation type ultrasonic transducer capable of generating high sound pressure over a high frequency band. FIG. 7 shows an example of a structure of a wide band oscillation type electrostatic ultrasonic transducer. The electrostatic ultrasonic transducer 3 in FIG. 7 is called “the pull type” since it operates only in a direction that an oscillation film is pulled to a fixed electrode side. [...

Claims

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Application Information

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IPC IPC(8): H04R3/00H04B3/00
CPCH04R19/00B06B1/0292
Inventor FUKUI, YOSHIKI
Owner SEIKO EPSON CORP
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