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Vacuum pump

A technology for vacuum pumps and pump inlets, applied to pumps, axial flow pumps, non-variable pumps, etc., which can solve problems such as mass increase, pump 16 difficult to drive, and mass spectrometer systems

Inactive Publication Date: 2008-10-29
EDWARDS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition to increasing the overall size of the pump 16, and thus the mass spectrometer system, the pump 16 is more difficult to drive due to the increased mass acting on the drive shaft due to the larger rotor and stator of the set 20

Method used

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  • Vacuum pump
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Examples

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Embodiment Construction

[0021] Referring to FIG. 2, a first embodiment of a vacuum pump 100 suitable for evacuating at least the high vacuum chamber 10 and the intermediate chamber 14 of the differential pumping mass spectrometer system described above with reference to FIG. The shaft 104 is mounted inside. The shaft 104 is rotated by a motor (not shown), such as a DC motor without brushes, arranged around the shaft. The shaft 104 is mounted on opposing bearings (not shown). For example, drive shaft 104 may be supported by a hybrid permanent magnetic bearing and oil lubricated bearing system.

[0022] The pump has at least four suction sections 106 , 108 , 110 and 112 . The first pumping section 106 includes a set of turbomolecular stations. In the embodiment shown in FIG. 2, the set of turbomolecular stations 106 includes four rotor blades and three stator blades of known pitched configuration. A rotor blade is indicated at 107a and a stator blade is indicated at 107b. In this example, rotor bl...

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PUM

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Abstract

A vacuum pump (100) comprises a first set (106) of turbo-molecular stages, a molecular drag stage (112), a first inlet (120) through which fluid can pass through the first set (106) of stages and the molecular drag stage (112) towards a pump outlet (116), second and third sets (108, 110) of turbo-molecular stages located between the first set (106) and the molecular drag stage (112), a second inlet (122), the second and third sets (108, 110) being arranged such that fluid entering the pump through the second inlet (122) is separated into two streams each flowing through a respective one of the second and third sets (108, 110), and conduit means (126) for conveying fluid passing through the first set (106) and one of the second and third sets (108, 110) towards the outlet (116).

Description

technical field [0001] The present invention relates to a vacuum pump and in particular to a compound vacuum pump with multiple ports suitable for differential pumping of multiple chambers. Background technique [0002] In a differential aspiration mass spectrometer system, the sample and carrier gas are introduced into a mass analyzer for analysis. One such example is given in Figure 1. Referring to FIG. 1 , in this system there is a high vacuum chamber 10 followed by first and second vacuum interface chambers 12 , 14 . The first interface chamber 12 is the highest pressure chamber in a vacuum spectrometer system and may contain small holes or capillaries through which ions are drawn from the ion source into the first interface chamber 12, and ion optics for guiding the ions Enter the second interface chamber 14 from the ion source. The second, intermediate chamber 14 may have additional ion optics for guiding ions from the first interface chamber 12 into the high vacuum...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D19/04F04B37/14
CPCF04D19/046
Inventor I·D·斯通斯
Owner EDWARDS LTD
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