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Photoelectric encoder

An encoder, photoelectric technology, applied in the direction of instruments, conversion sensor output, measurement devices, etc., can solve the problem of low response rate of the encoder that cannot be ignored, and achieve the effect of suppressing the increase of the number and preventing the increase of the junction capacitance.

Inactive Publication Date: 2009-09-02
MITUTOYO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, when the pitch of the optical grid of the scale is narrowed, the problem of the slow response rate of the encoder cannot be ignored.

Method used

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  • Photoelectric encoder
  • Photoelectric encoder

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Experimental program
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Effect test

no. 1 Embodiment approach

[0049] figure 1 It is a figure which shows the schematic structure of the photoelectric encoder 1 of 1st Embodiment. The present embodiment is mainly characterized by the structure of a photodetector chip included in the light receiving portion, and the photoelectric encoder 1 will be described as a premise for understanding thereof. First, the configuration of the encoder 1 will be described. The encoder 1 is composed of a light emitting diode (LED (light emitting diode)) 3, a scale 5 and a light receiving unit 7 arranged in the order close to the light emitting diode (LED).

[0050] The light emitting diode 3 is an example of a light source, and irradiates the scale 5 with the light L from the diode 3 . The scale 5 includes an elongated transparent substrate 9 made of a transparent material such as glass. exist figure 1 , indicating a part of it. The optical lattice 11 is formed on the surface of the transparent substrate 9 on the opposite side to the surface facing t...

no. 2 Embodiment approach

[0073] The second embodiment will be described focusing on the differences from the first embodiment. Figure 7 This is a plan view schematically showing the arrangement relationship between one light receiving surface and the calibration grid 33 in the central portion 29 of the PD array formed on the light receiving chip 15 of the photoelectric encoder according to the second embodiment. Figure 8 is observed from the VIII(a)-VIII(b) section Figure 7 A plan view of the structure shown.

[0074] In the second embodiment, the light shielding portion 35 of the calibration grid 33 is a part of the wiring connected to the photodiode 23 . It will be described in detail below. The light shielding portion 35 is made of conductive metal such as aluminum. The four light shielding portions 35 and the wirings 47 arranged on the light receiving surface 25 are located in the same layer. They are formed by simultaneous patterning. The two light-shielding portions 35-1 in the center of...

no. 3 Embodiment approach

[0079] The third embodiment will be described focusing on the differences from the first embodiment. Figure 9 It is a plan view schematically showing the photodiode array of the light receiving chip 15 of the third embodiment viewed from the optical lattice side. In this figure, the illustration of the calibration grid is omitted. Figure 10 It is a partial plan view of the light receiving chip 15 of the third embodiment. In this figure, the positional relationship between the light receiving surface 25 and the light transmitting portion 40 of the calibration grid is shown. The lattice arranged in front of the light receiving element is called a calibration lattice.

[0080] like Figure 9 As shown, the light-receiving surfaces 25 of the plurality of PDs 23 are arranged in two dimensions on the xy planes facing each other with the optical lattice. In other words, the plurality of PDs 23 are arranged in an array. It can also be said that the plurality of PDs 23 are arrang...

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PUM

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Abstract

A photoelectric encoder is provided. On the light-receiving chip of the photoelectric encoder, a plurality of photodiodes are arranged in an array along the measurement axis X. The distance between the PDs arranged at the ends of the array and the width of the light receiving surface 25 are smaller than the above-mentioned distance and the width of the PDs arranged at the center of the array.

Description

[0001] This application is a divisional application of the invention patent application named "Photoelectric Encoder" and the application number is 200410043298.0 filed by Mitutoyo Co., Ltd. on May 17, 2004. technical field [0002] The present invention relates to a photoelectric encoder for precise measurement. Background technique [0003] Conventionally, photoelectric encoders (hereinafter, also referred to as "encoders") have been used for precise measurement of linear displacement and angular displacement. The encoder is mounted on a three-dimensional measuring apparatus, an image measuring apparatus, or the like. The encoder is composed of a light source, a scale including an optical grating, and a light receiving portion that is relatively movable relative to the scale together with the light source. The light receiving section includes, for example, four light receiving elements (eg, photodiodes), and four index gratings having different phases arranged correspondi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D5/347
Inventor 小岛健司
Owner MITUTOYO CORP