Microstructure body and manufacturing method thereof

A technology for microstructures and manufacturing methods, which can be used in nanostructure manufacturing, anodization, nanotechnology, etc., and can solve problems such as inability to ensure continuity

Inactive Publication Date: 2008-11-12
FUJIFILM CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in this method, at the same time as the barrier layer is etched, the partition walls between the adjacent micropores

Method used

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  • Microstructure body and manufacturing method thereof
  • Microstructure body and manufacturing method thereof
  • Microstructure body and manufacturing method thereof

Examples

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Embodiment Construction

[0050] "The first embodiment of the method of manufacturing a microstructure"

[0051] A first embodiment of the method for producing a microstructure according to the present invention will be described with reference to the drawings. figure 1 and figure 2 It is a process diagram showing the manufacturing method, figure 1 is a stereogram, figure 2 With figure 1 Corresponding sectional view.

[0052] First, as the anodized metal body 10, an anodized metal body 10 ( figure 1 (a), figure 2 (a)). The shape of the anodized metal body 10 is not limited, and examples thereof include a plate shape and the like. In addition, it may be used in the form of having a support such as one in which the anodized metal body 10 is formed into a layered film on a support.

[0053] Next, the anodized metal body 10 is anodized until halfway, an aluminum oxide (Al 2 o 3 ) layer composed of anodized film (anodized part, anodized body) 11. Such as figure 1 (b), figure 2 As shown in (...

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PUM

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Abstract

A superfine construct and the method of producing the same; the method is able to simply produce the superfine construct having anodic oxide; the anodic oxide has a plurality of micro holes; the micro hole has excellent connectivity to connect to the electrical conductor. The method comprises: preparing anodized metal (10), anodizing the anodized metal (10), until the midway to form a plurality of anodized parts (11) having bottom micro holes (12) on the opening of the anodizing surface (10S) of the anodized metal (10) and non-anodized parts (13); dry etching the anodized part (14b) between bottom having a plurality of micro holes (12) and the non-anodized parts (13) to the non-anodized parts (13), thereby removing the same.

Description

[0001] technology area [0002] The present invention relates to a microstructure having a plurality of micropores on the surface and a method for producing the same, and particularly relates to a microstructure obtained by anodizing metal. Background technique [0003] A device has been proposed in which a substance is filled into a plurality of micropores of an anodized film obtained by anodizing a metal to make it functional. Anodized film (Al, etc.) obtained by anodizing metal (Al, etc.) 2 o 3 etc.) is a metal oxide having a plurality of fine pores that are naturally formed on the surface of the anodized film in the process of anodic oxidation and have a pore diameter on the order of nanometers and are approximately regularly arranged. Therefore, for example, by filling a plurality of micropores of the anodic oxide film with metal, microscopic metal bodies having a size on the order of nanometers can become microstructures substantially regularly arranged and fixed throu...

Claims

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Application Information

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IPC IPC(8): C25D11/02C25D11/04B82B3/00B82B1/00
Inventor 都丸雄一李静波
Owner FUJIFILM CORP
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