166 results about "Anodic oxide" patented technology

To provide a carrier for analysis that can suppress self-fluorescence.SOLUTION: A carrier 1 for analysis comprises a metal member 10 including a porous body 20, which includes a skeleton 22 formed by gathering a plurality of aluminum particles 21, and a plurality of gaps 23 encircled with the skeleton 22. The skeleton 22 has an outer shell 24, including an anodic oxide film including aluminum oxide, on surfaces of aluminum particles 21, wherein the porous body 20 has a porosity of 30 vol.% or more, the plurality of aluminum particles 21 have an average particle size of 0.1 to 20 μm, and the metal member 10 has an organic acid concentration of 150 / m2 / 100 μm or less.SELECTED DRAWING: Figure 1

The present invention relates to a method for simultaneously achieving a superhydrophobic and superoleophobic surface on 5,000 series aluminum alloy in an anodic oxidation process without a pre-patterning step, wherein the uniform anodic oxide film can be produced even without a pre-patterning step, thus making it possible to reduce manufacturing costs, the anodic oxide film can be imparted with superhydrophobicity and superoleophobicity according to a coating composition in which a cross-linked PDMS derivative represented by chemical formula 1 and an organic solvent are used in a specific mixing ratio, the coating composition has a low manufacturing cost and the coating film thickness can be adjusted to several to several tens of nm, thus enabling application to the coating of a microstructured oxide film, and the method can be useful for creating a machine learning database for developing 5,000 series aluminum alloy surface treatment technology.

This carrier for analysis (1) comprises a metal member (10) that includes a porous body (20). The porous body (20) includes a skeleton (22) that is formed by assembling a plurality of aluminum particles (21), and a plurality of voids (23) that are surrounded by the skeleton (22). The skeleton (22) has, on the surfaces of the aluminum particles (21), an outer shell (24) that includes an anodic oxide coating that contains aluminum oxide. The porosity of the porous body (20) is 30% by volume or more. The average particle diameter of the plurality of aluminum particles (21) is 0.1 µm to 20 µm. The organic acid concentration of the metal member (10) is 150 mg / m2 / 100 µm or less.

The invention discloses a preparation method of an anti-corrosion film layer on the surface of an electrical material aluminum alloy. The preparation method sequentially comprises the following steps of degreasing, alkali corrosion, neutralization decontamination, anodic oxidation, hole sealing, water washing and drying. An anodic oxidation solution used in the anodic oxidation step is a mixed compound solution and comprises hyperbranched polyester, sodium tannate and sulfuric acid, the concentration of the hyperbranched polyester is 2-2.8 g / L, the concentration of the sodium tannate is 0.021-0.029 mol / L, the concentration of the sulfuric acid is 0.05-0.07 mol / L, the sodium tannate and the hyperbranched polyester are added into the anodic oxidation solution, and the sodium tannate and the hyperbranched polyester are added into the anodic oxidation solution. And through the synergistic effect of the two components, the deposition mode and compactness of an anodic oxide film are improved, so that an anti-corrosion film layer formed on the surface of the electrical material aluminum alloy has excellent corrosion resistance and adhesive force.

The utility model belongs to the technical field of machining, and discloses a surface polishing device for a hard anodized layer of an aluminum alloy inner hole. One end of the mandrel and one end of the silica gel expansion sleeve are installed in a sealed mode; the other end of the silica gel expansion sleeve is fastened with the mandrel; the other end of the mandrel extends out of the silica gel expansion sleeve and is internally provided with a plug; the through hole is located in the outer circle of the mandrel in the silica gel expansion sleeve. Polishing abrasive paper is uniformly adhered to the silica gel expansion sleeve in the axial direction; and the actuating cylinder is sleeved outside the silica gel expansion sleeve. The pressure source is a pressure air source or a pressure water source. The aluminum alloy inner hole hard anodized layer surface polishing device can replace manual polishing, flexible expansion and contraction are achieved through the arrangement of the silica gel expansion sleeve, the polishing effect is good and even, the structure is simple, and economical efficiency is good.

The invention discloses a method for forming a plasma corrosion resistant coating for a gas spray header, which comprises the following steps of: providing the gas spray header which is provided with a plurality of air holes penetrating through the front surface and the back surface of the gas spray header; the inner wall of the air hole is covered with an anodic oxide layer; forming a silicon dioxide layer on the anodic oxide layer on the inner wall of the air hole by adopting a silicon dioxide sol-gel method; performing heat treatment on the silicon dioxide layer to obtain a silicon dioxide barrier layer with a hydrogen bond passivation surface; forming a plasma corrosion resistant coating on the front surface of the gas spray head; and removing the silicon dioxide barrier layer. The silicon dioxide barrier layer resists adhesion of subsequent ceramic deposits to the inner walls of the pores and isolates the ceramic deposits from falling into the inner walls of the pores; when the silicon dioxide barrier layer is removed through wet etching, a small amount of ceramic deposits adhered to the surface of the silicon dioxide barrier layer are removed together, and loose ceramic deposits are further prevented from being formed on the inner walls of the pores.

The invention relates to the technical field of surface treatment, in particular to a method for improving the forming quality of a hard anodic oxide film. The method for improving the forming quality of the hard anodic oxide film comprises the steps that S100, a base material is machined; s200, the roughness of the surface of the machined base material is measured; s300, whether the measured roughness is smaller than a preset roughness value or not is judged, if not, the step S400 is executed, and then the step S300 is executed; if yes, executing the step S500; s400, the base material is subjected to grinding treatment; and S500, the base material is subjected to hard anodic oxidation treatment, it can be guaranteed that the roughness of the base material subjected to hard anodic oxidation treatment is smaller than a preset roughness value, and it is avoided that when the surface roughness of the base material is large, the porosity of an anodic oxide film obtained by conducting hard anodic oxidation treatment on the base material is increased, and the service life of the anodic oxide film is prolonged. Therefore, the anode oxide film with uniform thickness, high hardness and good corrosion resistance is obtained, the quality and performance of the anode oxide film are improved, and the performance of a metal material is improved.

The invention belongs to the field of aluminum alloy processing, and provides a method for evaluating the corrosion resistance of an anodic oxide film and the corrosion capacity of a semi-synthetic cutting fluid, which comprises the following steps of: respectively taking a corrosive liquid or the semi-synthetic cutting fluid as an electrolyte and simulating a corrosive environment, and then taking an aluminum alloy sample as a working electrode to evaluate the corrosion resistance of the anodic oxide film and the corrosion capacity of the semi-synthetic cutting fluid; performing an electrochemical test in a corrosion environment to obtain charge transfer resistance Rct and corrosion current density Icorr, and then calculating a corrosion resistance index CI; the higher the obtained corrosion resistance index CI value is, the higher the corrosion resistance of the anodic oxide film of the aluminum alloy sample is, or the lower the corrosion capacity of the semi-synthetic cutting fluid is. And the corrosion resistance of the anodic oxide film or the corrosivity of the semi-synthetic cutting fluid can be rapidly and accurately evaluated.

The invention belongs to the technical field of hole sealing reagents, and discloses a high-color-fixation medium-temperature hole sealing agent for an aluminum alloy anodic oxide film as well as a preparation method and application of the high-color-fixation medium-temperature hole sealing agent. The medium-temperature hole sealing agent comprises hole sealing main salt, hole sealing auxiliary salt, a color fixing auxiliary agent and an auxiliary agent, the hole sealing main salt comprises nickel acetate or nickel acetate hydrate; the hole sealing secondary salt comprises at least one of cobalt acetate, magnesium acetate, lithium acetate and calcium acetate; the color fixing auxiliary agent comprises at least one of tannic acid, gallic acid, quercetin, ellagic acid, tannic acid and catechin. According to the medium-temperature hole sealing agent, hole sealing of the aluminum alloy oxidation film is achieved under the medium-temperature (55-65 DEG C) condition, meanwhile, the color fixing process of dye molecules in micropores of the oxidation film is synchronously completed through the effect of the specific color fixing auxiliary, and the problems of uneven hole sealing and color fading caused by a separation technology are solved. And after the hole sealing agent is used for treatment, the binding force of the dye and an oxidation film can be enhanced, and the dye is not easy to fade in a high-temperature and high-humidity environment for a long time.

The invention provides an anodic oxide film, a preparation method thereof and a metal workpiece. The preparation method of the anodic oxide film comprises the following steps: carrying out anodic oxidation treatment on an aluminum or aluminum alloy metal matrix to form a porous anodic oxide film on the surface of the metal matrix; and the hole walls of the porous anodic oxide film are corroded through an etchant solution, so that a plurality of microstructures are generated on the hole walls, the white anodic oxide film is obtained, the etchant solution contains at least one of aluminum sulfate and sulfuric acid, and the microstructures comprise at least one of microcracks and micropores. According to the preparation method provided by the invention, the diffuse reflection effect of light is enhanced, so that the white appearance of the anodic oxide film is improved, and the stability and uniformity of the anodic oxide film are also improved. In addition, the method is simple in process, better in environmental protection property and capable of meeting the requirements of modern white anodic oxide film production for high performance and sustainable development.

The invention discloses colorful pattern processing equipment for a titanium cup, which can realize automatic colorful pattern processing, and is simple to operate and high in pattern precision. Comprising an anodic oxidation system used for conducting anodic oxidation coloring treatment on the surface of a titanium cup; the device comprises a liquid medicine tank, a cleaning tank, a clamping system and a lifting system, the liquid medicine tank is used for containing electrolyte; the cleaning tank is used for containing cleaning liquid; the clamping system is arranged on one side of the liquid medicine tank and the cleaning tank and used for clamping the titanium cup; the lifting system can enable the titanium cup to be immersed in or separated from the electrolyte or the cleaning liquid by lifting the titanium cup or the liquid medicine tank and the cleaning tank; the laser system is arranged on one side of the clamping system and is used for removing an anodic oxide layer from the colored area or forming a required pattern; the laser system comprises a laser, and the transmitting end of the laser faces the clamping system; and the control system is used for inputting required patterns and equipment operation parameters and controlling the equipment to automatically operate.

An electronic product having a silicon-on-insulator substrate, a porous layer of anodic oxide or anodic hydroxide over the silicon layer of the silicon-on-insulator substrate, and a metal layer over the porous layer and that defines at least one electrical transmission line. The velocity of the electrical signal in the at least one electrical transmission line may be controlled by appropriate configuration of the porosity ratio of the porous layer.

The invention belongs to the technical field of aluminum alloy materials, and particularly relates to a colored aluminum anode oxide film and a preparation method thereof. Aluminum is sequentially subjected to electrochemical polishing and anodic oxidation to obtain an aluminum anodic oxide film, then the aluminum anodic oxide film is immersed in an azo precursor solution, and a red azo dye is synthesized in situ in pores of the porous oxide film through an azo reaction between diazonium salt and benzene sulfonate, so that coloring of the aluminum oxide film is completed. By synthesizing sulfonic acid modified alendronate and compounding the sulfonic acid modified alendronate to form the electrochemical polishing solution, the electrochemical polishing quality of the surface of an aluminum sheet can be effectively improved. An electrolyte additive with phosphate groups, carboxyl groups and alcohol amino groups at the same time is used for anodic oxidation, a porous oxidation film with the appropriate pore size is formed, finally, an azo precursor of a specific structure is screened, loading fixation of azo dye on the porous film is further improved by means of sulfonic acid groups on azo molecules, and the stability of the anode is improved. And the aluminum oxide film with a good coloring effect is obtained.

The invention provides an acid etching treatment method of an aluminum alloy for anodic oxidation and the aluminum alloy subjected to acid etching treatment. The acid etching treatment method comprises the following steps: S1, carrying out dipping treatment on the aluminum alloy by adopting a surface treatment solution to obtain the dipped aluminum alloy; and S2, the aluminum alloy subjected to dipping treatment is washed, and acid etching treatment of the aluminum alloy for anodic oxidation is completed. The aluminum alloy is subjected to dipping treatment through the surface treatment liquid, a clean and uniform aluminum alloy surface is obtained, favorable conditions are created for continuous and uniform growth of a subsequent anodic oxidation film layer, and introduction of anodic oxidation defects is effectively reduced. Compared with a traditional alkali etching and bright dipping process, the acid etching treatment method for the aluminum alloy avoids the problems of large aluminum alloy loss and surface intergranular over-corrosion induced by alkali etching, the flatness and compactness of a subsequent anodic oxide film can be effectively improved, the anti-corrosion performance and surface quality of the aluminum alloy anodic oxide film layer are improved, and the service life of the aluminum alloy anodic oxide film layer is prolonged. And the production efficiency and the product quality are greatly improved.

The invention relates to the technical field of material surface treatment, and discloses a surface treatment method for an aluminum alloy with a fluorescent layer and an aluminum alloy workpiece. The surface treatment method for the aluminum alloy with the fluorescent layer comprises the following steps that S1, an aluminum alloy matrix is subjected to anodic oxidation treatment, and a porous anodic oxidation film is formed on the surface of the aluminum alloy matrix; s2, fluorescent ink is locally sprayed on the surface of the porous anodic oxide film, curing is carried out, a local fluorescent layer is formed, and the area where the fluorescent ink is not sprayed is a non-fluorescent area; s3, performing global dyeing on the porous anodic oxide film of the local fluorescent layer and the non-fluorescent region, and drying to form a global covered dyeing layer; and S4, hole sealing is conducted, a hole sealing layer covering the whole area is formed on the dyeing layer, and the aluminum alloy workpiece is prepared. When the UV lamp irradiates, fluorescent patterns are shown on the aluminum alloy workpiece, so that the functions of identity information recognition and counterfeiting prevention are achieved, and the aluminum alloy workpiece is excellent in corrosion resistance and wear resistance and meets the subdivision requirements in the fields of industry, consumption, safety and the like.

The invention discloses a surface treatment system and method based on new energy aluminum alloy parts, and relates to the technical field of aluminum alloy surface treatment.The system comprises a temperature regulation and control module, a current density adjustment module, an ion concentration real-time monitoring module, an oxidation reaction tank module and an electrolyte dynamic balance management module; through the synergistic effect of gradient porosity anodic oxide film control and electrolyte dynamic balance, the comprehensive performance of the new energy aluminum alloy part is remarkably improved, the inner layer compact structure of the gradient oxide film can effectively isolate water, oxygen and other corrosive media, and the part still has excellent corrosion resistance in the complex environment; the outer porous structure provides abundant anchoring points for a subsequent coating, the binding force of the coating and the aluminum alloy matrix is greatly enhanced, the phenomena of peeling, peeling and the like of the coating are avoided, and long-term stability of the appearance and the function of the part is guaranteed.

The invention provides an anodic oxidation film layer control method based on electrochemical regulation and control. The method comprises the steps that the metal ion concentration in anodic oxidation electrolyte is monitored in real time; adjusting electrolyte components based on the real-time concentration data; performing forced convection circulation on the electrolyte with optimized components in the vertical direction by driving the electrolyte, and applying a pre-polarization voltage lower than a formal oxidation stage; the method comprises the following steps: immersing a to-be-treated workpiece into an electrolyte with activated components, and applying electrochemical regulation and control based on a four-electrode mode; monitoring the growth rate of the preliminary oxidation film layer in real time; and optimal process parameters are predicted based on the growth rate data, and electrochemical regulation and control parameters are adjusted according to the optimal process parameters, so that the preliminary oxidation film layer continues to grow, and the anodic oxidation film layer is formed. Effective electrochemical driving force applied to the surface of the workpiece can be accurately controlled, control errors caused by solution resistance and temperature drift are overcome, and therefore high-precision and high-stability control over the oxidation film growth process is achieved.

A method for creating oil-filled porous anodic oxide coatings for stainless steel is disclosed. The coating has anti-corrosion and omniphobic properties to resist both atmospheric conditions, or other conditions with exposure to vapor, and wet conditions, in which the coating is exposed to and / or immersed in liquid. The anodic oxide coating of the present invention can be made by the steps of cleaning and / or electropolishing a steel substrate, applying anodic oxidation to the steel substrate, washing the steel substrate in an organic solvent, and annealing the substrate at high temperature. To fill the porous coating with an oil, a solvent exchange method may be applied.

The utility model provides a device for improving adhesive force control of an anode oxide film on the surface of an aluminum plate, which comprises a sealed cabin, a supporting seat, a laser, a first sliding rail and a bendable reflecting mirror, the supporting seat is arranged at the bottom of the inner side of the sealed cabin, and the first sliding rail is fixedly arranged on the surface of one side in the sealed cabin along the horizontal direction; the laser slides on the first sliding rail, the reflecting face of the bendable reflecting mirror faces the lower portion of the laser, the mirror face of the bendable reflecting mirror can be bent around an axis parallel to the length direction of the first sliding rail, and emergent light of the laser is reflected by the bendable reflecting mirror and then is emitted to the supporting base. According to the utility model, by changing the curvature of the reflecting position on the bendable reflecting mirror, the size of a laser spot irradiated to the surface of the aluminum plate is changed, so that the laser power in unit area is changed, the ablation control of roughness is realized, and the aim of improving and changing the adhesive force of an anodic oxide film on the surface of the aluminum plate is fulfilled.

The utility model provides an anti-interference high-heat-dissipation seven-layer circuit board, which sequentially comprises a conductive layer, a first insulating layer, a power supply layer, a second insulating layer, a grounding layer, a third insulating layer and a metal base layer from top to bottom, and graphene composite films are uniformly distributed and embedded on the edges of the sides of the metal base layer in order; a snakelike heat dissipation channel is formed in one side surface, close to the third insulating layer, of the metal base layer, and the snakelike heat dissipation channel is filled with a heat-conducting silicone grease layer; a heat conduction block is arranged at the position, away from the snake-shaped heat dissipation channel and the circuit area, of the metal base layer, and the heat conduction block is arranged close to the high heat dissipation area of the circuit board; a heat conduction block penetrates through the third insulating layer and is in contact with the grounding layer in an attached manner; the first insulating layer is provided with a plurality of honeycomb-shaped hexagonal grooves, and the honeycomb-shaped hexagonal grooves are filled with ferrite filling layers. And an anodic oxide layer is arranged on one side surface, far away from the third insulating layer, of the metal base layer. And the anti-interference and anti-corrosion functions are good, and the heat dissipation function is high.

The present invention relates to the technical field of anode foil pulse pore generation and specifically relates to a composite pulse waveform pore generation technology for a high-thickness aluminium foil anode foil. In the composite pulse waveform pore generation technology for a high-thickness aluminium foil anode foil of the present invention, a low-frequency pulse is used in the initial stage of pore generation, a high-frequency pulse is used in the middle and later stages of tunnel pore growth, and low-frequency pulsing is performed one more time after alternating between the low-frequency pulse and the high-frequency pulse several times, thereby optimizing the structure and properties of an anodic oxide film, refining pores, improving the density and uniformity of the pores, and significantly improving the specific capacitance and mechanical properties of a finished etched foil.

This invention relates to the technical fields of aircraft component processing, testing, and inspection, and provides a method for detecting surface defects in epoxy-coated aluminum alloy plates. The method involves applying an epoxy coating containing zinc yellow pigment onto an anodic oxide film to construct a coated test piece with color difference indication function, which is then exposed to a coastal atmospheric environment for sampling. During the detection process, data such as gloss loss rate, color difference, contact angle, defect area ratio, and corrosion current density are collected. A dynamic correction coefficient is calculated based on the degree of zinc yellow pigment hydrolysis, adaptively adjusting the threshold values ​​of each parameter and constructing a threshold set. Combining scanning electron microscopy image segmentation and Tafel extrapolation analysis, multi-source indicators are integrated to determine whether the coating has failed. This method can track the hydrolysis behavior of zinc yellow pigment in real time, automatically correct the judgment criteria for optical, morphological, and electrochemical indicators, and improve the accuracy and reliability of failure detection of epoxy-coated aluminum alloy plates under coastal service conditions.

The present application relates to a kind of welding-free tight-fitting sealing structure of lightweight electric control valve and its assembly method, in particular to electric control valve technical field.The present application includes shell, stainless steel piece, valve body, pressure ring washer, sealing ring and electromagnetic coil, valve body is made of aluminum alloy base material and surface covers anodic oxide layer, electromagnetic coil is aluminum coil, realize overall lightweight.Sealing ring is sleeved in the end of stainless steel piece and is in interference fit with shell and stainless steel piece, form reliable radial seal;Pressure ring washer is located at the intersection of shell, valve body and stainless steel piece, one side is pressed against the axial end surface of sealing ring, the other side is abutted with valve body, with axial positioning and sealing enhancement function;Shell and valve body are fixedly connected in tight fit, without welding.The structure avoids welding thermal deformation, sealing is reliable, assembly is convenient, and it is suitable for the application scene of electric control valve with strict requirements on weight and sealing.

An enclosure for an electronic device includes an aluminum alloy substrate and an anodic oxide coating disposed on the aluminum alloy substrate, the anodic oxide coating having a nano-scale etched pattern. The enclosure includes a matte-white finish having a flop index between about 2 and about 10. The anodic oxide coating has a L* value of greater than about 90, an a* value of less than about 1, and a b* value of less than about 2. The enclosure includes a sealant disposed on the anodic oxide coating, the sealant including a sol-gel coating, a hard-coat, an anodic electrophoretic deposition coating, or a combination thereof.

The present invention relates to a method for simultaneously achieving a superhydrophobic and superoleophobic surface on a 3,000 series aluminum alloy in an anodic oxidation process without a pre-patterning step, wherein a uniform anodic oxide film can be produced even without a pre-patterning step, thus making it possible to reduce manufacturing costs, the anodic oxide film can be imparted with superhydrophobicity and superoleophobicity due to a coating composition in which a cross-linked PDMS derivative represented by chemical formula 1 and an organic solvent are used in a specific mixing ratio, the coating composition has a low manufacturing cost and has the effect of being applicable to the coating of a microstructured oxide film since the coating film thickness can be adjusted to several to several tens of nm, and the method can be useful for creating a machine learning database for developing 3,000 series aluminum alloy surface treatment technology.

An enclosure for an electronic device includes a metal substrate, a porous anodic oxide layer overlaying the metal substrate, and a hydrothermal sealant disposed on the anodic oxide layer, the hydrothermal sealant including a molten salt.

The preparation method comprises the following steps that S1, an anodic oxidation base film is formed, specifically, an aluminum alloy workpiece subjected to surface treatment is subjected to anodic oxidation, the anodic oxidation base film with an anchoring groove is formed on the surface of the aluminum alloy workpiece, and the anodic oxidation base film is dried for standby application after being washed with water; s2, electrostatic powder spraying, melting and composite film forming: performing electrostatic powder spraying on the anodic oxidation base film obtained in the step S1 by taking polytetrafluoroethylene powder as a raw material, heating the aluminum alloy workpiece after spraying is completed, melting the polytetrafluoroethylene powder adsorbed on the surface of the aluminum alloy workpiece into a film, and naturally cooling to obtain the composite film. A composite film formed by compounding the anodic oxidation base film and polytetrafluoroethylene is obtained; and S3, magnetic control polishing is conducted, specifically, the composite film on the surface of the aluminum alloy workpiece in the S2 is polished and leveled through magneto-rheological polishing liquid, and then the aluminum alloy workpiece is obtained. The aluminum alloy composite anode oxide film prepared through the method has good abrasion resistance and corrosion resistance.

The present invention provides a multilayer ceramic dielectric for an inductor and an inductor using same, wherein a first anodic oxide film having a low porosity due to having relatively small pores or a relatively small number of pores is positioned on upper and lower surface layers, and a second anodic oxide film having a large porosity due to having relatively large pores or a relatively large number of pores is positioned on inner layers positioned between the upper and lower surface layers to make the dielectric constant high on the upper and lower surfaces and low in an inner region so that a current path operates efficiently on the surface sides, and the efficiency of magnetic field passage inside can be enhanced to improve high-frequency characteristics.

The present invention provides a method for manufacturing a structure that can be easily joined to a joining object. The method comprises: a conductive layer forming step of locally forming a conductive layer having conductivity on a surface of an insulating support having at least one surface; a valve metal layer forming step of forming a valve metal layer that covers at least a portion of the conductive layer; an anodic oxide film forming step of performing an anodic oxidation treatment using the conductive layer as an electrode to form the valve metal layer in a region above the conductive layer into an anodic oxide film; a micropore forming step of forming a plurality of micropores extending in the thickness direction of the anodic oxide film; and a filling step of filling the micropores with a conductive substance, wherein a valve metal layer removal step of removing the valve metal layer after the anodic oxide film forming step is included between the anodic oxide film forming step and the filling step.

The present disclosure relates to a method for forming a film on a metal member, the method including the following steps.　A first step for forming linear recesses at prescribed intervals on the surface of the metal member, a second step for forming an anodic oxide film on the surface of the metal member on which the recesses are formed, a third step for heat-treating the metal member on which the anodic oxide film is formed to form cracks in the anodic oxide film, and a fourth step for sealing the metal member on which the anodic oxide film is formed to fill the cracks with a hydrate.　Furthermore, the present disclosure also includes a method for manufacturing a member manufactured using the aforementioned film formation method, and a plasma processing device comprising the member.