Air cleaning system purification chamber
An air cleaning and clean room technology, applied in the field of clean rooms of air cleaning systems, can solve problems such as increasing the proportion of defects
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0036] Now, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[0037] Figure 4 is a structural view showing a clean room of an air cleaning system according to an exemplary embodiment of the present invention. Figure 5 is a view illustrating laminar flow in a clean room according to an exemplary embodiment of the present invention. 6A and 6B illustrate a clean room according to an exemplary embodiment of the present invention, wherein FIG. 6A is a transverse sectional view viewed from the top, FIG. 6B is a longitudinal sectional view viewed from the front, and FIG. 6C is viewed from the side. Longitudinal section view.
[0038]As shown in FIGS. 6A to 6C , the clean room 100 of this embodiment includes a working chamber 110 and a fan filter unit 120 . The working chamber 110 is provided with a work area of a predetermined size to perform a corresponding work. The fan filter unit 120 supplies filtered...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 