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Apparatus for substrate appearance inspection

A technology for visual inspection devices and substrates, used in measuring devices, optical testing flaws/defects, instruments, etc.

Inactive Publication Date: 2009-04-01
OLYMPUS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] However, in the inspection apparatuses of Patent Document 1 and Patent Document 2 mentioned above, when the conveyance speed of the substrate to be photographed is further increased, in order to obtain a good image of the substrate to be photographed, a camera with high sensitivity and high-speed imaging are required. signal processing systems, etc.

Method used

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  • Apparatus for substrate appearance inspection
  • Apparatus for substrate appearance inspection
  • Apparatus for substrate appearance inspection

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no. 1 approach

[0046] Hereinafter, a substrate appearance inspection device according to a first embodiment of the present invention will be described with reference to the drawings.

[0047] The substrate visual inspection device 1 of the present embodiment is used to inspect, for example, Image 6 The shown substrate conveying path (substrate conveying unit) 25 having a conveyor 23 composed of a plurality of rollers 21, or on Figure 7 The entire surface of the mother glass substrate (substrate to be inspected. Hereinafter referred to as "substrate") 33 for manufacturing FPD conveyed on the substrate conveyance path 31 provided with the floating plate 29 having a plurality of ejection holes 27 is imaged. A device for microscopic inspection.

[0048] Such as figure 1 with figure 2 As shown, the substrate visual inspection apparatus 1 has: a substrate conveyance path 25 connecting manufacturing devices for manufacturing a substrate 33; The appearance of the surface of the substrate 33 i...

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Abstract

The present invention provides a substrate appearance inspecting device which can obtain a vivid image of checked substrate conveyed from a conveying path without a high-performance device thereby executing high-precision microscopic inspection. The substrate appearance inspecting device (1) comprises the following components: a substrate conveying path (25) which moves a substrate (33) in a constant direction; a lighting part (13) which irradiates light to the substrate (33); a camera shooting part (15) which receives the reflected light which is irradiated from the lighting part (13) and reflected at the substrate (33) or penetrated light that penetrates the substrate (33); a driving part (7) which moves the lighting part (13) and the camera shooting part (15) wholly; and a controlling part (11) which controls the driving of driving part (7) to cause that the driving part (7) moves the lighting part (13) and the camera shooting part (15) along a direction same with the moving direction of the substrate (33).

Description

technical field [0001] The invention relates to a substrate appearance inspection device. Background technique [0002] Conventionally, as a technique for inspecting defects and the like generated on mother glass substrates (substrates to be inspected) used in the manufacture of LCDs (liquid crystal displays), etc., it is known to take images of substrates to be inspected that are moving on a transport path. An inspection device for inspection (see Patent Document 1 and Patent Document 2). [0003] In the inspection device of Patent Document 1, before the substrate to be inspected reaches a predetermined position within the imaging field of view, the position of the substrate to be inspected and the time required to reach it are obtained, and the entire substrate to be inspected is photographed at the predetermined position to be photographed. for microscopic inspection. [0004] Furthermore, in the inspection device of Patent Document 2, an imaging unit composed of a line...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/956
CPCG01N21/8803G01N21/95G01N2021/9513G02F1/1309
Inventor 西泽诚
Owner OLYMPUS CORP
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