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Molecular drag pumping mechanism

A pumping mechanism and stator technology, applied to pumps, components of pumping devices for elastic fluids, axial flow pumps, etc., can solve problems such as damage to the compressibility of Siegbahn pumping mechanisms, reduce gas leakage rate, improve The effect of gas compressibility

Active Publication Date: 2009-08-26
EDWARDS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it has been found that the presence of an air gap of this size can still seriously impair the compressibility of the Siegbahn pumping mechanism

Method used

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  • Molecular drag pumping mechanism
  • Molecular drag pumping mechanism
  • Molecular drag pumping mechanism

Examples

Experimental program
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Embodiment Construction

[0019] image 3 A portion of a vacuum pump is shown. The vacuum pump includes a drive shaft 100 supported for rotation about a longitudinal axis 104 by a motor 106 by sets of bearings 102 . The impeller 108 is mounted on the drive shaft 100 for rotation therewith. The impeller 108 includes a plurality of rotor elements 110, 112, 114 of a Siegbahn pumping mechanism. In this example, the rotor element is in the form of a planar disk member extending outwardly from the drive shaft 100 substantially normal to the axis 104 .

[0020] The multiple stator elements of the Siegbahn pumping mechanism are located between the rotor elements. In this example, the Siegbahn pumping mechanism comprises three rotor elements 110, 112, 114 and two stator elements 120, 122, although any number of rotor elements and stator elements can be provided as required to meet the desired pumping performance of the vacuum pump .

[0021] Each stator element 120, 122 is in the form of an annular stator ...

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Abstract

A vacuum pump comprises a drive shaft and a Siegbahn pumping mechanism. The Siegbahn pumping mechanism comprises a rotor element located on the drive shaft and an annular stator element located about the drive shaft and proximate the rotor element, the stator element comprising a plurality of walls extending towards the rotor element and defining a plurality of spiral channels. The stator elementcomprises a plurality of sections, with means such as a resilient member being located about the sections to urge the sections together, and thereby inhibit gas leakage between the sections of the stator element. The resilient member can also form a seal between the stator sections and a casing located about the pumping mechanism.

Description

technical field [0001] The present invention relates to molecular drag pumping mechanisms, and more particularly to Siegbahn pumping mechanisms. Background technique [0002] Molecular drag pumping mechanisms work on the general principle that gas molecules impinging on a high-speed moving surface at low pressure gain a velocity component from the moving surface. As a result, molecules tend to acquire the same direction of motion as the surface they collide with, which drives the molecules through the pump and creates relatively high pressure near the pump exhaust. [0003] These pumping mechanisms generally include a rotor and a stator having one or more spiral or helical channels opposite the rotor. One type of molecular drag pumping mechanism is the Siegbahn pumping mechanism comprising a rotating planar element opposed to a disc-shaped stator element defining a helical channel extending from the outer perimeter of the stator towards the center of the stator. [0004] ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04D17/16F04D19/04
CPCF04D17/168F04D29/668F04D29/056
Inventor M·E·托尔纳M·斯皮特勒
Owner EDWARDS LTD