Molecular drag pumping mechanism
A pumping mechanism and stator technology, applied to pumps, components of pumping devices for elastic fluids, axial flow pumps, etc., can solve problems such as damage to the compressibility of Siegbahn pumping mechanisms, reduce gas leakage rate, improve The effect of gas compressibility
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[0019] image 3 A portion of a vacuum pump is shown. The vacuum pump includes a drive shaft 100 supported for rotation about a longitudinal axis 104 by a motor 106 by sets of bearings 102 . The impeller 108 is mounted on the drive shaft 100 for rotation therewith. The impeller 108 includes a plurality of rotor elements 110, 112, 114 of a Siegbahn pumping mechanism. In this example, the rotor element is in the form of a planar disk member extending outwardly from the drive shaft 100 substantially normal to the axis 104 .
[0020] The multiple stator elements of the Siegbahn pumping mechanism are located between the rotor elements. In this example, the Siegbahn pumping mechanism comprises three rotor elements 110, 112, 114 and two stator elements 120, 122, although any number of rotor elements and stator elements can be provided as required to meet the desired pumping performance of the vacuum pump .
[0021] Each stator element 120, 122 is in the form of an annular stator ...
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