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Motion compensation system and method of MEMS spectrometer

A motion compensation, spectrometer technology, applied in the field of analytical instruments

Active Publication Date: 2010-08-18
JIANGSU HUITONG GRP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] The purpose of the present invention is to provide a MEMS spectrometer optical device motion compensation control system and method to solve the problems of MEMS optical device temperature stability and mechanical stability in the MEMS spectrometer, so that the MEMS spectrometer has good adaptability and application prospects

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  • Motion compensation system and method of MEMS spectrometer
  • Motion compensation system and method of MEMS spectrometer
  • Motion compensation system and method of MEMS spectrometer

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Embodiment Construction

[0029] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0030] like figure 1 As shown, the present invention includes MEMS optical device 1, and it is in the constant temperature cabinet, to reduce the impact of ambient temperature on its periodic motion amplitude; This system also includes motion signal sensor 2, motion signal amplifier 3, motion signal AD converter 4. Motion compensation control processor 5, MEMS device driving DA converter 6, MEMS device driving amplifier 7, temperature sensor 8. The motion signal sensor 2 collects the motion signal of the MEMS optical device 1, and is connected with the motion signal amplifier 3, and the motion signal is sent to the motion signal amplifier 3; the motion signal amplifier 3 is connected with the motion signal AD converter 4, and the motion signal AD converter 4 The motion signal is subjected to analog-to-digital conversion, and then the signal is s...

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Abstract

The invention discloses a motion compensation system and a method of an MEMS spectrometer, the system comprises an MEMS optical device, a motion signal sensor, a motion signal amplifier, a motion signal AD converter, a motion compensation control processor, a driving DA converter of the MEMS device, a driving amplifier of the MEMS device and a temperature sensor, and all the parts constitute a closed loop control system. The motion compensation method comprises the following steps: 1) compiling a standard motion trajectory data table; 2) compiling a motion compensation signal data table; 3) starting the spectrometer; 4) detecting the motion trajectory of the MEMS optical device; 5) comparing with the standard motion trajectory, and judging whether the motion trajectory is normal or not; 6) if so, returning to the step 4); and 7) if not, inquiring the motion compensation signal data table and regulating a driving signal. The system and the method can solve the problems of poor temperature stability and poor vibration resistance of the MEMS spectrometer.

Description

technical field [0001] The invention relates to a motion control system and method, in particular to a motion compensation control system and method for MEMS spectrometer optical devices, and belongs to the technical field of analytical instruments. Background technique [0002] Spectroscopy is a technique for measuring the intensity of light in the ultraviolet, visible, near-infrared and infrared bands. It is widely used in various fields, such as color measurement, concentration detection of chemical components or electromagnetic radiation analysis. The traditional spectrometer is composed of many optical, electrical and mechanical discrete devices, which requires extremely complex optical system and precise mechanical structure, which reduces the reliability of the whole instrument, and has strict requirements on the working and storage environment of the instrument, which limits the its wider application. Especially for the application requirements of online (on-site) s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J3/02
Inventor 龙涛唐明严松
Owner JIANGSU HUITONG GRP