Motion compensation system and method of MEMS spectrometer
A motion compensation, spectrometer technology, applied in the field of analytical instruments
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[0029] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.
[0030] like figure 1 As shown, the present invention includes MEMS optical device 1, and it is in the constant temperature cabinet, to reduce the impact of ambient temperature on its periodic motion amplitude; This system also includes motion signal sensor 2, motion signal amplifier 3, motion signal AD converter 4. Motion compensation control processor 5, MEMS device driving DA converter 6, MEMS device driving amplifier 7, temperature sensor 8. The motion signal sensor 2 collects the motion signal of the MEMS optical device 1, and is connected with the motion signal amplifier 3, and the motion signal is sent to the motion signal amplifier 3; the motion signal amplifier 3 is connected with the motion signal AD converter 4, and the motion signal AD converter 4 The motion signal is subjected to analog-to-digital conversion, and then the signal is s...
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