Focal-depth expanding method and device based on phase and polarization

An expansion method and a technology of polarized light, applied in the field of focusing methods and devices for expanding the depth of focus, can solve problems such as poor effect and increase system cost, and achieve the effects of improving beam quality, saving system cost, and uniform intensity

Inactive Publication Date: 2011-11-23
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This kind of superposition is just a simple addition of light intensity, the effect is very poor, and it is greatly limited in practical applications, which increases the cost of the system

Method used

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  • Focal-depth expanding method and device based on phase and polarization
  • Focal-depth expanding method and device based on phase and polarization
  • Focal-depth expanding method and device based on phase and polarization

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Embodiment Construction

[0047] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments, but the present invention is not limited thereto.

[0048] like figure 1 A device for realizing focal depth extension is shown, including: a light source 1, a polarization converter 2, a first beam splitter 3, a 0 / π circular phase plate 4, a second beam splitter 5, and a first reflector 6. The second reflection mirror 7 and the apochromatic focusing lens 8 , after focusing, the extended focal depth spot appears near the working plane 9 of the apochromatic focusing lens 8 .

[0049] Wherein, the polarization converter 2 is a Radial-Azimuthal Polarization Converter from ARCoptix Company of Sweden, and the first reflector 6 and the second reflector 7 are metal film reflectors that can keep the polarization characteristics of incident light and reflected light consistent.

[0050] The collimated and parallel working light beam is emitted by the light sourc...

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Abstract

The invention discloses a focal-depth expanding method comprising the following steps of: converting work beam polarization into cylindrical polarized light and splitting the cylindrical polarized light into two beams, wherein after being coded by 0-Pi phases, one beam and the other beam which is optically replicated irradiate the same optical beam combiner inwards to form a combined coaxial beam, and after the combined coaxial beam is focused by a lens, an expanded focal-depth spot is obtained. The invention also discloses a focal-depth expanding device comprising a light source, a polarizedlight converter, an optical splitter, a 0 / Pi phase plate, an optical replicating device, an optical beam combiner and an apochromat focusing lens. For the focal depths of specific types of focusing spots, the method and the device use coherent light as work beams, save system cost and increase practicability, meanwhile, the focal depths of the expanded focusing spots are increased by above two times, the beam quality is increased, the focusing spots can reach below the self diffraction limitation of a system, and the expanded light intensity has more even distribution and is more beneficial for practical application.

Description

technical field [0001] The invention relates to the field of photolithography and super-resolution imaging, in particular to a focusing method and device for extending the focal depth. Background technique [0002] Research on extended focal depth in optical disk storage, microscope imaging, optical calibration, and tomographic imaging has been carried out one after another. Among them, Wavefront Coding (WFC) is a new method for extending the focal depth of optical systems that was developed in the 1990s. technology, proposed by Dowski and Cathey in 1995. In recent years, the research on obtaining extended depth of focus through polarization effects has also attracted attention. Recently, it has been reported that the use of radial and tangential vector beams, quasi-bifocal birefringent lenses, and cemented double lenses to achieve extended depth of focus has been reported. The above methods have carried out extensive and in-depth research on the optical axial expansion dep...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/00G02B27/28G02B5/30
Inventor 匡翠方郝翔库玉龙刘旭王婷婷李旸晖
Owner ZHEJIANG UNIV
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