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Device and method for generating low-energy high-density plasma by multi-level ionization

A plasma, low-energy technology, applied in the field of plasma, can solve the problem of increasing the number of arrays, and achieve the effects of high electron density, low energy, and improved efficiency and quality

Inactive Publication Date: 2011-08-10
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Researchers have used arrayed plasma jets to obtain large-area non-equilibrium atmospheric pressure plasma jets, but this only increases the number of plasma jets to obtain a larger area of ​​plasma, and only by increasing the number of arrays also encounters problems. various problems

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  • Device and method for generating low-energy high-density plasma by multi-level ionization
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  • Device and method for generating low-energy high-density plasma by multi-level ionization

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Embodiment Construction

[0022] Combine below figure 1 , figure 2 , image 3 , the present invention is described in detail:

[0023] Such as figure 1 As shown, a stable flow of gas is passed into the device, and the gas passes through each discharge stage of the device in turn, among which six needle-point electrodes of the second stage are used as an example to illustrate.

[0024] First, the flow rate of the device is 5-50m 3 / h gas and turn on the first stage high-frequency high-voltage alternating power switch 1, the gas passes through such as figure 2 In the circular channel shown, the six needle-point electrodes 6 and the metal rod electrodes 7 respectively form a discharge circuit under the action of six first high-frequency high-voltage power supplies 2 (the peak voltage of this level of power supply is not lower than 6kV, and the frequency is not lower than 20kHz), so that The gas passing through the first-stage discharge electrode is initially ionized under the action of a high-fre...

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Abstract

The invention provides a device and a method for generating low-energy high-density plasma by multi-level ionization. The device is divided into three levels, wherein the first level is composed of a needle point electrode and a metal bar electrode; the second level is composed of a cannular metal electrode and the metal bar electrode; and the third level is composed of a metal mesh electrode and the metal bar electrode. The method for generating low-energy high-density plasma by multi-level ionization comprises the following steps: introducing in 5-50m3 / h gas; primarily ionizing the gas under the action of the first level of 50-100W power supply power; ionizing a plasma subjected to primary ionization by the second level of 50-100W power supply power to generate an even plasma with higher density; ionizing the plasmas ionized by the first level and the second level by the third level of 50-100W power supply power, and disturbing airflow by the level; and finally, under the action of low-power input, injecting even unbalance plasma jet flow of which the cross section diameter is 15-20mm, wherein the electron energy of the even unbalance plasma jet flow does not exceed 1ev, and an electron density magnitude is as high as 1022 / m<3>.

Description

technical field [0001] The invention belongs to the field of plasma science and technology, and relates to a method and a device for generating low-energy high-density plasma by multi-stage ionization. Background technique [0002] Atmospheric pressure non-equilibrium plasma jets have important application significance in engineering technology fields such as combustion, surface electromagnetic characteristics change, and material surface treatment. Integrating some shortcomings of atmospheric pressure non-equilibrium plasma jets reported at home and abroad, among them, atmospheric pressure non-equilibrium plasma jets The disadvantage of small plasma formation area and volume is particularly obvious (generally concentrated in the order of millimeters), which restricts the wide application of this technology. Practical applications often require large-area plasma, so how to expand the plasma treatment area is also a matter of atmospheric pressure plasma. A problem that jet te...

Claims

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Application Information

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IPC IPC(8): H05H1/30
Inventor 顾璠张基栋李森
Owner SOUTHEAST UNIV
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