Device and method for generating low-energy high-density plasma by multi-level ionization
A plasma, low-energy technology, applied in the field of plasma, can solve the problem of increasing the number of arrays, and achieve the effects of high electron density, low energy, and improved efficiency and quality
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[0022] Combine below figure 1 , figure 2 , image 3 , A detailed description of the present invention:
[0023] Such as figure 1 As shown, a gas with a stable flow rate is introduced into the device, and the gas passes through the discharge stages of the device in sequence, of which six needle tip electrodes of the second stage are taken as examples for illustration.
[0024] First, the device has a flow rate of 5~50m 3 / h of gas and turn on the first-stage high-frequency and high-voltage alternating power switch 1, the gas passes such as figure 2 As shown in the annular channel, the six-pointed electrode 6 and the metal rod electrode 7 respectively form a discharge circuit under the action of the six first high-frequency and high-voltage power supplies (the peak voltage of this power supply is not less than 6kV, and the frequency is not less than 20kHz), so that The gas passing through the first-stage discharge electrode is initially ionized under the action of the high-freque...
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