Three-dimensional adjustment measuring platform capable of automatically loading large-diameter optical lens

Abstract

The invention discloses a three-dimensional adjustment measuring platform capable of automatically loading a large-diameter optical lens, mainly consisting of a multi-station balancing table, a conveying mechanism and a three-dimensional adjustment mechanism, wherein a transmission table assembly in the three-dimensional adjustment mechanism can automatically convey a workpiece holder which clamps the large-diameter optical lens to the center of the adjustment measuring platform so as to align an interference system; and the three-dimensional gesture of the large-diameter optical lens can be conveniently adjusted by a precisely-lifting component, a pitching adjustment assembly and a turntable assembly which are located in the three-dimensional adjustment mechanism, so that the full automatic work of loading and aligning an object to be measured is realized before measuring. The components of the three-dimensional adjustment measuring platform are convenient to manufacture, steady and flexible in work and high in reliability; simultaneously, the measuring efficiency of the three-dimensional adjustment measuring platform is high, the height adjustment range of the large-diameter optical lens to be tested is up to 100-150 mm, the adjusting accuracy of the pitching and leveling rotation can be up to 0.02 sec, thus the requirement of pipelining type automatic measuring is realized.The three-dimensional adjustment measuring platform capable of automatically loading the large-diameter optical lens can be widely applied to automatic loading and precise measuring of the large-diameter optical lens.

Description

technical field [0001] The invention belongs to a large-diameter optical precision detection and experiment device, in particular to a three-dimensional adjustment measuring platform capable of automatically loading large-diameter optical lenses. Background technique [0002] In large-scale optical projects, it is necessary to use a large number of large-diameter optical lenses with a diameter of more than 400mm. For example, in the "Shenguang" project, more than 10,000 optical elements with a diameter of 400mm or more will be used. These large-aperture optical components must be subjected to very heavy surface error detection through an interference system before use. Considering that the temperature and stress balance time of large-diameter optical components is longer when detecting the surface shape, in order to improve the detection efficiency, existing methods such as Zygo Company of the United States use a multi-station balance table, which can place more than 8 optic...

AI Technical Summary

Problems solved by technology

The biggest defect of this detection device is that it cannot automatically load the large-caliber optical components to be tested, which is time-consuming and labor-intensive, and the detection efficiency is very low. Moreover, the three-dimensional adjustment frame is manually adjusted without an electronic control adjustment device, and the stability of the measurement is relatively low. Poor, low adjustment accuracy, so flow operation and automatic measurement cannot be realized

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