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Technology for preparing silane by reacting lithium aluminum hydride with silicon tetrachloride in aether medium

A technology of silicon tetrachloride and lithium aluminum hydride, applied in the direction of silicon hydride and the like, can solve problems such as pollution, and achieve the effects of reasonable process technology and convenient preparation

Inactive Publication Date: 2011-10-05
TIANJIN TAIHENG GASES
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This technology not only has reasonable process and simple preparation, but also improves the purity of silane produced to 5N (99.999%) and solves the problem of environmental pollution

Method used

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  • Technology for preparing silane by reacting lithium aluminum hydride with silicon tetrachloride in aether medium
  • Technology for preparing silane by reacting lithium aluminum hydride with silicon tetrachloride in aether medium

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Embodiment Construction

[0016] refer to figure 1 , making an integrated condenser (15) connected to the pre-mixer (3), the left side of the pre-mixer (3) connected to the left metering controller (8), the right side of the pre-mixer (3) connected to the right metering controller (9), the left The metering controller (8) is connected to the large-capacity left storage tank (1), the right metering controller (9) is connected to the large-capacity right storage tank (2), and the left liquid supply pipe (4) is connected and installed on the large-capacity left storage tank (1). ) and the left inert gas outlet (6), the large-capacity right storage tank (2) is connected and installed with the right liquid supply pipe (5) and the right inert gas outlet (7), and the pre-mixer (3) is connected and installed with an internal filler (11) The reaction chamber (10), H 2 The inlet (12), the waste liquid storage tank (13), and the metering control system (14) are assembled into one body to form.

[0017] The pres...

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Abstract

The invention discloses a technology for preparing silane by reacting lithium aluminum hydride with silicon tetrachloride in an aether medium. The technology is mainly characterized in that: an integrally-manufactured condenser is connected with a premixer; the left side of the premixer is connected with a left measurement controller, and the right side of the premixer is connected with a right measurement controller; the left measurement controller is connected with a large-capacity left storage tank; the right measurement controller is connected with a large-capacity right storage tank; the large-capacity left storage tank is connected with a left liquid supply pipe and a left inert gas outlet; the large-capacity right storage tank is connected with a right liquid supply pipe and a right inert gas outlet; and a reaction chamber filled with packing, an H2 inlet, a waste liquid storage tank and a measurement control system are connected and arranged on the lower part of the premixer and are integrally assembled. The technology has a reasonable process, makes manufacture simple and is an ideal technology for silane preparation.

Description

Technical field [0001] The invention relates to a silicon chemical product, in particular to a technology for preparing silane by reacting lithium aluminum hydride and silicon tetrachloride in ether medium, which is suitable for chemical synthesis of silane. Background technique [0002] At present, microelectronics technology is the main cornerstone of modern information technology and military technology, and one of the key factors to promote scientific and technological progress, industrial development, economic take-off and social advancement. Integrated circuit is the core of microelectronics technology, and its development level and industrial scale have become an important symbol to measure a country's economic strength. Electronic specialty gases (such as silane), especially high-purity electronic gases as a new category of electronic chemical materials, are important factors restricting the reliability and yield of integrated circuits. With the rapid development of...

Claims

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Application Information

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IPC IPC(8): C01B33/04
Inventor 李中元
Owner TIANJIN TAIHENG GASES
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