Optical switch and optical switch array
A technology of optical switch and rotating part, which is applied in the field of optical communication, can solve the problems of complex locking structure, difficult integration, large chip area, etc., and achieve the effect of simple state locking, large-scale integration, and easy large-scale integration
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[0014] The optical switch and the optical switch array provided by the embodiments of the present invention are described in detail below in conjunction with specific embodiments.
[0015] In order to solve the problems existing in the prior art, the optical switch provided by the embodiment of the present invention adopts a form self-adaptive remodeling (Form Self Remolding, FSR) material in its locking structure, and utilizes the FSR material to the optical switch The state locking is carried out after switching the light-on state. Since the FSR material has deformation memory and structural remodeling, it can simply realize the state locking of the optical switch. On the one hand, it does not need to occupy a large chip area; on the other hand, it enables The optical switch is easy to realize large-scale integration.
[0016] For example, the optical switch may be a MEMS optical switch, which includes a semiconductor substrate with a rotating part and a twist beam, a micro-...
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