Optical Switches and Optical Switch Arrays
An optical switch and rotating part technology, applied in the field of optical communication, can solve the problems of complex locking structure, difficult integration, large chip area, etc., and achieve the effect of simple state locking, large-scale integration, and easy large-scale integration.
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[0014] The optical switch and the optical switch array provided by the embodiments of the present invention are described in detail below in conjunction with specific embodiments.
[0015] In order to solve the problems existing in the prior art, the optical switch provided by the embodiment of the present invention adopts the shape self-adaptive reshaping FSR material in its locking structure, and uses the FSR material to switch the light-on state of the optical switch to perform state switching. Locking, because the FSR material has deformation memory and structural remodeling, it can simply realize the state locking of the optical switch, on the one hand, it does not need to occupy a large chip area, on the other hand, it makes the optical switch easy to implement Integration at scale.
[0016] For example, the optical switch may be a MEMS optical switch, which includes a semiconductor substrate with a rotating part and a twist beam, a micro-mirror arranged on the surface o...
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