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MEMS Condenser Microphone

A technology of micro-electromechanical capacitors and microphones, applied in the direction of electrostatic transducers, microphones, etc., can solve problems such as thermal stress residues, and achieve the effect of overcoming deformation

Inactive Publication Date: 2011-11-30
NATIONAL TSING HUA UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] Therefore, the object of the present invention is to solve the above-mentioned problem of thermal stress residue, and then propose a micro-electromechanical condenser microphone with high diaphragm flatness, good stress release ability and easy manufacture

Method used

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Examples

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Embodiment Construction

[0023] The present invention proposes a micro-electromechanical condenser microphone, which utilizes a supporting element to support the centroid of the diaphragm, so as to assist the diaphragm to achieve the effect of releasing stress. Relevant detailed description and technical contents of the present invention, now cooperate with accompanying drawing to illustrate as follows:

[0024] see Figure 3-1 and Figure 3-2 As shown, in an embodiment of the present invention, the proposed MEMS condenser microphone 20 includes: a base 21, a diaphragm 22, a fixing member 23 and a back plate 24; wherein, the back plate 24 is set on the base 21, and the back plate 24 is provided with a plurality of sound holes 25 passing through the back plate 24; the base 21 includes a back cavity 26 corresponding to the position of the back plate 24, so that these sound holes can be communicate with the back cavity 26; the fixing member 23 is arranged on the base 21 and straddles the back cavity 26...

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Abstract

The present invention proposes a micro-electromechanical condenser microphone, which includes a supporting part and a diaphragm; wherein, the supporting part supports the central part of the diaphragm, so as to accelerate the elimination and release of the stress generated by the diaphragm in the thermal process, so that the diaphragm The film is kept flat to improve the accuracy of capacitive sensing.

Description

technical field [0001] The invention relates to a micro-electromechanical condenser microphone, in particular to a micro-electromechanical condenser microphone with high vibrating film flatness and low stress residual. Background technique [0002] The development trend of electronic products has always been in the direction of thinner and thinner and higher efficiency, and the evolution of microphones is no exception. Microphones are used to receive sound and convert it into electrical signals, and are widely used in daily life, such as being installed in telephones, mobile phones, recording pens, etc. Taking a condenser microphone as an example, the change of sound will force the corresponding deformation of the membrane structure in the form of sound waves, and the deformation of the membrane structure will cause the capacitance to change. Therefore, the pressure difference value can be read by sensing the capacitance change to know the sound. The change. [0003] Compa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04R19/04
Inventor 方维伦詹竣凯
Owner NATIONAL TSING HUA UNIVERSITY