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Dispatch control method and dispatch control equipment

A control method and technology for controlling equipment, applied in the field of manufacturing, can solve problems affecting production flexibility, yield decline, etc.

Active Publication Date: 2016-04-13
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, rigidly controlling the number of products in each machine after a certain number of machines must be changed will greatly affect the flexibility of production and even lead to a decline in productivity.

Method used

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  • Dispatch control method and dispatch control equipment

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Embodiment Construction

[0028] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be described in detail below in conjunction with specific embodiments and accompanying drawings.

[0029] figure 1 A flow chart of a dispatch control method according to an embodiment of the present invention is schematically shown.

[0030] Such as figure 1 As shown, in the dispatching control method according to the embodiment of the present invention, the initial setting allocation equipment selection step S1 is first performed, which is used to select the current batch of equipment from among the multiple equipment used to process the current batch of products in the factory The product selects the initial setting to distribute the device. Specifically, for a semiconductor manufacturing factory, for example, multiple wafers (for example, 25 wafers) can be set as a batch of products, or even one wafer can be set as a batch of products. ...

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Abstract

The invention provides a work dispatch control method and work dispatch control equipment. The work dispatch control method comprises the following steps: an initial set distribution equipment selection step, which is used for selecting initial set distribution equipment for products of a current batch from some equipment that are used for processing the products of the current batch in a factory; a determination step, which is used for determining whether the batch number of n batches of recently produced products on the initial set distribution equipment exceeds m that is less than n; a first execution step, which is used for distributing the products of the current batch to the initial set distribution equipment on the condition that the determined result by the determination step is sure; and a second execution step, which is used for not distributing the products of the current batch to the initial set distribution equipment on the condition that the determined result by the determination step is negative.

Description

technical field [0001] The present invention relates to the field of manufacturing, and more specifically, the present invention relates to a dispatching control method and dispatching control equipment. Background technique [0002] In the field of manufacturing, for example, in the field of semiconductor chip manufacturing and processing, in the process of manufacturing or processing products, multiple devices of the same kind are often used to manufacture or process a large number of products. [0003] Therefore, the strategy of distributing a large number of products among the plurality of devices of the same kind (ie, the dispatching strategy) often greatly affects the efficiency of product processing. [0004] In the existing product dispatching control method, in order to reduce the risk of machine abnormality, risk sharing can be carried out by evenly distributing the product quantity to multiple machines. However, rigidly controlling the number of products of each ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/02H01L21/67
Inventor 陈蕾鲍晔胡林周孟兴
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP