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Optical modulator pixel unit and manufacturing method thereof

A technology of pixel unit and light modulator, applied in optical components, optics, instruments, etc., can solve the problems of inappropriate micro-display system and large chip area.

Active Publication Date: 2012-04-04
XIAN YISHEN OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Existing light modulators need 3 grating light valves to form a color pixel, and the chip area is large, which is not suitable for micro-display systems

Method used

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  • Optical modulator pixel unit and manufacturing method thereof
  • Optical modulator pixel unit and manufacturing method thereof
  • Optical modulator pixel unit and manufacturing method thereof

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Embodiment Construction

[0057] The inventor found that in the prior art, three grating light valves are required to work together to form a color pixel, which are respectively used for modulation of red light, green light, and blue light, which occupies a large chip area and high cost, and is not suitable for micro-display systems. .

[0058] In order to solve the above problems, the inventor proposes a light modulator pixel unit, which uses the principle of light diffraction to modulate light, and can use one light modulator pixel unit to modulate light of three colors, occupying a small chip area and low cost , can be better applied to micro-display systems, and the pixel unit of the light modulator of the present invention has a high utilization rate of light, so that the energy consumption of a single pixel of the light modulator of the present invention is small, and the overall energy consumption of the light modulator is small .

[0059] The device structure of the pixel unit of the light mod...

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Abstract

The invention provides an optical modulator pixel unit, comprising a top electrode, a movable electrode and a bottom electrode which are formed on a substrate. Under control of a control circuit, the location of the movable electrode can be skewed, when the movable electrode is located at a first location, first light diffracts at the top electrode, when the movable electrode is located at a second location, second light diffracts at the top electrode, and when the movable electrode is located at a third location, third light diffracts at the top electrode. The first light, the second light and the third light are light in three primary colors. The optical modulator pixel unit can modulate the light in the three colors, and is applicable to a micro-display system.

Description

technical field [0001] The invention relates to a light modulator, in particular to a light modulator pixel unit applied to a micro display system and a manufacturing method thereof. Background technique [0002] In a projection system, the key building block is the light modulator. Existing optical modulators include micro-electro-mechanical components (Micro-Electro-Mechanical Systems, MEMS), and the optical modulator controls the movement of the micro-electro-mechanical components by controlling electrical signals applied to the The movement modulates the light incident on the light modulator to output light with a certain gray scale. [0003] Generally, a light modulator includes a plurality of pixel units arranged in a matrix. There are two types of existing light modulator pixel units: a digital mirror device (digital mirror device, DMD) that uses the principle of light reflection and a digital mirror device that uses the principle of light diffraction. Grating light...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08
CPCG02B26/02G02B26/0808G02B26/001
Inventor 毛剑宏唐德明韩凤芹
Owner XIAN YISHEN OPTOELECTRONICS TECH CO LTD