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Method and apparatus for depositing a film using a rotating source

A technology for equipment and thin film materials, applied in the field of depositing thin films and equipment using rotating sources, can solve the problems of low material utilization, waste, etc.

Inactive Publication Date: 2012-05-23
KATEEVA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Second, wetted inks may interact with the underlying substrate
In addition, the traditional dry transfer technology only utilizes a part of the material on the transfer medium, resulting in low material utilization and considerable waste

Method used

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  • Method and apparatus for depositing a film using a rotating source
  • Method and apparatus for depositing a film using a rotating source
  • Method and apparatus for depositing a film using a rotating source

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0038] figure 1 A rotary drum deposition system according to one embodiment of the present disclosure is schematically illustrated. exist figure 1 , the film material supply mechanism 122 measures out the film material. The metered film material 124 can be metered as one or more droplets or as a trickle.

[0039] The film material can be supplied to the transfer surface in the form of solid ink, liquid ink or gaseous vapor ink consisting of pure film material or film material and non-film material (otherwise referred to as "carrier material"). The use of ink is beneficial because it provides the film material to the transfer surface with one or more non-film materials for processing the film material before it is deposited on the substrate. The thin film material may consist of OLED material. The film material may comprise a mixture of materials. The carrier material may also comprise mixtures of materials.

[0040] An example of a liquid ink is a thin film material diss...

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PUM

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Abstract

The disclosure generally relates to a method and apparatus for depositing a substantially solid film onto a substrate. The solid film can be an Organic Light- Emitting Diode (''OLED''). In one embodiment, the disclosure relates to using a material supply, a rotating or moving mechanism having at least one transfer surface which is supplied with film material in one orientation and delivers film material to the substrate at a second orientation such that film material delivered to the substrate deposits in substantially solid form. The delivery to the substrate can be performed without the transfer surface materially contacting the substrate. The film material can be deposited on the transfer surface in either solid form or in liquid form (e.g., as a mixture of carrier liquid and dissolved or suspended film material).

Description

[0001] This application claims priority to Provisional Application Serial No. 61 / 283,011, filed November 27, 2009, and Application Serial No. 12 / 139,404, filed June 13, 2008, which claims June 2007 Priority of provisional application No. 60 / 944,000 filed on the 14th. The entire disclosure of the above application is hereby incorporated by reference. technical field [0002] The present disclosure generally relates to a method and apparatus for depositing a substantially solid thin film onto a substrate. More specifically, the present disclosure relates to a novel method of printing organic light emitting diode ("OLED") thin films using a rotating source. Background technique [0003] When printing electronic films, it is important that a dry film is deposited onto the surface such that the material being deposited forms a substantially solid film when in contact with the substrate. This is in contrast to ink printing where wet ink is deposited onto a surface and the ink th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56H05B33/10
CPCB41M3/003B41F16/00H01L51/001H10K71/164H05B33/10H10K71/00
Inventor 康纳尔·马迪根金贤洙达留什·格尔达瓦尔里·卡森德马努什·比朗亚历山大·寿-康·廓埃利亚胡·弗龙斯基
Owner KATEEVA
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