Light absorption transparent thin film of thin film solar battery
A technology of solar cells and transparent films, applied in the field of solar power generation, can solve the problem of waste of solar radiation energy, and achieve the effect of improving photoelectric conversion efficiency and reducing thermalization effect.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Examples
Embodiment 1
[0014] Tin dioxide doped with 0.5wt% Y is used as the target material, and the film is coated by an intermediate frequency reaction vertical magnetron sputtering coating equipment.
[0015] Taking the silicon wafer as the substrate, firstly clean the silicon wafer, dry it, put it into the coating chamber, feed O2 with a purity of 99.99%, the flow rate is 150 sccm, the voltage is 800 V, the current is 20 A, the substrate temperature The temperature is 300°C, and the working pressure is 0.5Pa.
Embodiment 2
[0017] Tin dioxide doped with 0.5wt% Y is used as the target material, and the film is coated by an intermediate frequency reaction vertical magnetron sputtering coating equipment.
[0018] With the silicon wafer as the substrate, the silicon wafer is first cleaned, dried and put into the coating chamber, and O with a purity of 99.99% is introduced 2 , the flow rate is 150 sccm, the voltage is 700 V, the current is 30 A, the substrate temperature is 350 ° C, and the working pressure is 0.5 Pa.
Embodiment 3
[0020] Tin dioxide doped with 0.8wt% Y is used as the target material, and the film is coated by an intermediate frequency reaction vertical magnetron sputtering coating equipment.
[0021] Taking the silicon wafer as the substrate, firstly clean the silicon wafer, dry it and put it into the coating chamber, feed O2 with a purity of 99.99%, the flow rate is 100 sccm, the voltage is 600 V, the current is 30 A, the substrate temperature The temperature is 400°C, and the working pressure is 0.8Pa.
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com