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Antireflection film for trough type solar collector tube

A trough-type solar energy and anti-reflection film technology, which is applied in the field of solar power generation, can solve the problems of too large a change in the refractive index, difficult control of the refractive index and thickness, and unfavorable mass production, etc., to reduce thermal effects and improve photoelectric conversion efficiency effect

Inactive Publication Date: 2012-10-10
SUZHOU JIAYAN ENERGY EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The anti-reflection coating of nano-film materials is not conducive to mass production due to the complex process, high cost and difficulty in control
At the same time, because the refractive index and thickness of each layer of this multilayer anti-reflection film are difficult to control, and the refractive index changes too much, the effect of reducing the reflectivity of the aluminum sheet surface to light is not ideal. The effect of passivating the surface and body of the aluminum sheet is contradictory and restricts each other. Therefore, the effect of this anti-reflection coating on the surface and body passivation of the aluminum sheet is relatively poor, and the performance of the prepared solar cell sheet still cannot meet the current requirements. technological development

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0014] Pure aluminum sheet is used as the target material, and the film is coated by intermediate frequency reaction vertical magnetron sputtering coating equipment.

[0015] With the silicon wafer as the substrate, the aluminum sheet is first cleaned, dried and put into the coating chamber, and N with a purity of 99.99% is introduced 2 , the flow rate is 50-100 sccm, the voltage is 800 V, the current is 20 A, the substrate temperature is 100 °C, and the working pressure is 10 Pa. After the sputtering deposition is completed, it is annealed at 300 °C for 30 min in a reducing atmosphere.

Embodiment 2

[0017] Pure aluminum sheet is used as the target material, and the film is coated by intermediate frequency reaction vertical magnetron sputtering coating equipment.

[0018] With the silicon wafer as the substrate, the aluminum sheet is first cleaned, dried and put into the coating chamber, and N2 with a purity of 99.99% is introduced, the flow rate is 50-100 sccm, the voltage is 800 V, and the current is 20 A. The substrate temperature was 150 °C, the working pressure was 10 Pa, and after the sputtering deposition was completed, annealing treatment was performed at 200 °C for 90 min in a reducing atmosphere.

Embodiment 3

[0020] Pure aluminum sheet is used as the target material, and the film is coated by intermediate frequency reaction vertical magnetron sputtering coating equipment.

[0021] With the silicon wafer as the substrate, the aluminum sheet is first cleaned, dried and put into the coating chamber, and N2 with a purity of 99.99% is introduced, the flow rate is 50-100 sccm, the voltage is 800 V, and the current is 20 A. The substrate temperature was 150°C, and the working pressure was 10Pa. After the sputtering deposition was completed, annealing treatment was performed at 250°C for 30 min in a reducing atmosphere.

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Abstract

The invention relates to an antireflection film for a trough type solar collector tube; and the antireflection film is made of AlN1-x, wherein x is equal to 0.15-0.35. The antireflection film can reduce the average reflectivity of an electromagnetic wave with a wavelength of 300-900nm to 2.5-3.5%. According to the antireflection film disclosed by the invention, a transparent film is deposited onto the upper surface of a silicon solar cell, so that the thermalization effect of the silicon solar cell can be reduced, and the photoelectric conversion efficiency of the cell is improvde.

Description

technical field [0001] The invention belongs to the technical field of solar power generation, and more specifically, the invention relates to an anti-reflection film for a trough-type solar heat collection tube. Background technique [0002] With the depletion of traditional energy sources and the aggravation of environmental pollution, the development and application of new energy sources has become a hot spot in human research. Inexhaustible, green and pollution-free solar energy is one of the key points in the development and utilization of new energy. [0003] Reducing cost and improving conversion efficiency are the key directions of solar cell research. Silicon solar cells occupy a dominant position in the solar cell market due to a wide range of raw material sources and low cost. Reducing the reflection of incident sunlight on the light-receiving surface of the cell is one of the means to improve the photoelectric conversion efficiency of the solar cell. The commo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0216
Inventor 葛波
Owner SUZHOU JIAYAN ENERGY EQUIP
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