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Antireflective film for groove-type solar thermal collector

A trough solar energy and anti-reflection film technology, applied in the field of solar power generation, can solve the problems of too large refractive index change, difficult control of refractive index and thickness, and unfavorable large-scale production, so as to reduce the thermal effect and improve the photoelectric conversion. The effect of efficiency

Inactive Publication Date: 2012-10-10
SUZHOU JIAYAN ENERGY EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The anti-reflection coating of nano-film materials is not conducive to mass production due to the complex process, high cost and difficulty in control
At the same time, because the refractive index and thickness of each layer of this multilayer anti-reflection film are difficult to control, and the refractive index changes too much, the effect of reducing the reflectivity of the silicon wafer surface to light is not ideal. The effect of passivating the surface and body of the silicon wafer is contradictory and mutually restrictive, so the anti-reflection film has a poor passivation effect on the surface and body of the silicon wafer, and the performance of the prepared solar cell still cannot meet the current requirements. technological development

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0014] The pure titanium plate is used as the target material, and the intermediate frequency reaction vertical magnetron sputtering coating equipment is used for coating.

[0015] With the silicon wafer as the substrate, the silicon wafer is first cleaned, dried and put into the coating chamber, and O with a purity of 99.99% is introduced 2 , the flow rate is 50-150 sccm, the voltage is 800 V, the current is 20 A, the substrate temperature is 300 °C, and the working pressure is 0.5 Pa. After the sputtering deposition is completed, it is annealed at 450 °C for 1.5 h in a reducing atmosphere.

Embodiment 2

[0017] The pure titanium plate is used as the target material, and the intermediate frequency reaction vertical magnetron sputtering coating equipment is used for coating.

[0018] With the silicon wafer as the substrate, the silicon wafer is first cleaned, dried and put into the coating chamber, and O with a purity of 99.99% is introduced 2 , the flow rate is 50-150 sccm, the voltage is 700 V, the current is 20 A, the substrate temperature is 400 ° C, the working pressure is 0.5 Pa, and after the sputtering deposition is completed, it is annealed at 400 ° C for 1 h in a reducing atmosphere.

Embodiment 3

[0020] The pure titanium plate is used as the target material, and the intermediate frequency reaction vertical magnetron sputtering coating equipment is used for coating.

[0021] With the silicon wafer as the substrate, the silicon wafer is first cleaned, dried and put into the coating chamber, and O with a purity of 99.99% is introduced 2 , the flow rate is 50-150 sccm, the voltage is 600 V, the current is 20 A, the substrate temperature is 500 ° C, the working pressure is 0.5 Pa, and after the sputtering deposition is completed, it is annealed at 500 ° C for 0.5 h in a reducing atmosphere.

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Abstract

The invention relates to an antireflective film for a groove-type solar thermal collector. The antireflective film is characterized in that the antireflective film is SiO2-X, wherein the X=0.10-0.25. Average reflectivity of the antireflective film on electromagnetic waves with the length of 300-900nm reduces to 2.5-3.5%. A transparent film of the antireflective film is deposited on the surface of a silicon solar cell, the thermalization effect of the silicon solar cell is reduced, and photoelectric conversion efficiency of the cell is improved.

Description

Technical field [0001] The present invention is a technical field of solar power generation. More specifically, the invention involves a grooved solar heat collector. Background technique [0002] With the increasing exhaustion of traditional energy and the increasing environmental pollution problems, the development and application of new energy have become a hot spot for human research.Undefeated, green and polluting solar energy is one of the focus of new energy development and utilization. [0003] Reducing costs and improving conversion efficiency is the key direction of solar battery research.Silicon solar cells have a wide range of raw materials and low cost, occupying the leading position of the solar cell market.Reducing the reflection of the battery's incident on the light surface is one of the means to improve the photoelectric conversion efficiency of solar cells.Commonly used reflex measures are mainly engraving silicon substrates, and the light surface of titanium d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0216
Inventor 葛波
Owner SUZHOU JIAYAN ENERGY EQUIP
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