PECVD (Plasma Enhanced Chemical Vapor Deposition) flexible solar battery manufacturing equipment

Abstract

The invention discloses PECVD (Plasma Enhanced Chemical Vapor Deposition) flexible solar battery manufacturing equipment. The equipment comprises at least one vacuum chamber, wherein at least one electrode chamber is arranged in each vacuum chamber and sequentially comprises an inner tube, a middle tube and an outer tube from inside to outside; the two ends of the inner tube, the middle tube and the outer tube are fixed through end closures; the distance between the inner tube and the middle tube is equal everywhere; and the inner tube and the middle tube respectively serve as an inner electrode and an outer electrode and are connected with a radio frequency generator. The PECVD flexible solar battery manufacturing equipment has the advantages that the inner tube and the middle tube are made into plasma discharge electrodes, the accuracy of space between the electrodes is automatically ensured, and the film formation quality in a PECVD technological process is ensured.

Description

technical field [0001] The invention relates to the technical field of solar cell coating equipment, in particular to PECVD flexible solar cell manufacturing equipment. Background technique [0002] At present, solar cell modules widely manufactured in the world are based on silicon wafers or glass, and are rigid structures that cannot be bent. They are heavy, bulky, and impact-resistant, so they are not suitable for mobile applications. At present, only a few companies in the world have mastered the manufacture of solar cell modules with stainless steel foil (Stainless Steel) or polyimide (Kepton) and other polymer films as substrates. The products are flexible or semi-flexible, bendable, light in weight, and bulky. Small, excellent performance such as impact resistance, suitable for mobile applications. [0003] In the prior art, the "roll-to-roll" sample delivery technology is used for semiconductor vacuum coating, which needs to go through different vacuum chambers for ...

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Problems solved by technology

Taking the stainless steel substrate as an example, the typical thickness is 0.125 mm, and the equipment is very complicated and huge, so the equipment cost is high, the product is not flexible, and it is semi-flexible. The typical bending radius is about 200 mm, and the weight per unit area of ​​the product is relatively high. high

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