Servo-type heavy-load ultraprecise air bag supporting electric leveling system and leveling method thereof

An adjustment method and a heavy-duty technology, applied in the direction of control using feedback, etc., can solve problems such as high driving power, difficulty in fast and high-precision adjustment of support height, and difficulty in fast and high-precision adjustment of the leveling platform

Active Publication Date: 2014-06-04
HARBIN INST OF TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At this time, the mechanical design of the drive adjustment mechanism of each support point is heavy and the drive power is high, it is difficult to achieve fast and precise control, and it is difficult to achieve fast and high-precision adjustment of the support height
Therefore, the levelness of the leveling platform is also difficult to achieve fast and high-precision adjustment

Method used

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  • Servo-type heavy-load ultraprecise air bag supporting electric leveling system and leveling method thereof
  • Servo-type heavy-load ultraprecise air bag supporting electric leveling system and leveling method thereof
  • Servo-type heavy-load ultraprecise air bag supporting electric leveling system and leveling method thereof

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specific Embodiment approach 1

[0042] Specific implementation mode one: combine figure 1 and figure 2 Describe this embodiment, the servo-type heavy-duty ultra-precision airbag support electric leveling system described in this embodiment, the electric leveling system includes a base 1, a leveling platform 6, an airbag 4, and M groups of electric support height adjustment devices , an electronic level 12 and a controller; the value of M is an integer greater than 2;

[0043] The electronic level 12 is arranged on the upper surface of the leveling platform 6;

[0044] The lower surface of the leveling platform 6 contacts the top of the air bag 4, and the bottom of the air bag 4 is fixed on the base 1, and the position of the air bag 4 corresponds to the center of the base 1 and the leveling platform 6;

[0045] M sets of electric support height adjustment devices are arranged between the leveling platform 6 and the base 1, M sets of electric support height adjustment devices are equally spaced outside the...

specific Embodiment approach 2

[0054] Embodiment 2: This embodiment is a further limitation of the servo-type heavy-duty ultra-precision airbag supporting electric leveling system described in Embodiment 1. The servo height adjustment device includes a reducer 3, a ball screw 10, a wire Female 11, sleeve 9 and ball hinge 8;

[0055] The reducer 3 is fixed on the base 1, the power output end of the servo motor 2 is connected with the power input end of the reducer 3, the torque output end of the reducer 3 is connected with the torque input end of the ball screw 10, and the ball screw 10 is connected to one end of the sleeve 9 through a screw nut 11, and the other end of the sleeve 9 is connected to the ball joint 8, and the ball joint 8 is fixed on the lower surface of the leveling platform 6.

[0056] In this embodiment, the airbag 4 is used as the main support to bear most of the weight (90% or higher) of the leveling platform 6 and the load 7, and the electric support height adjustment device bears the re...

specific Embodiment approach 3

[0057] Embodiment 3: This embodiment is a further limitation of the servo-type heavy-duty ultra-precision airbag supporting electric leveling system described in Embodiment 1 or 2. The value of M is 3, 4 or 6.

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Abstract

The invention provides a servo-type heavy-load ultraprecise air bag supporting electric leveling system and a leveling method thereof, and belongs to the technical field of ultraprecise instrument equipment platforms. The servo-type heavy-load ultraprecise air bag supporting electric leveling system and the leveling method thereof aim to solve the problem that fast and high-precision adjustment is difficult to achieve on the supporting height through a current dynamic leveling system. The electric leveling system comprises a base, a leveling platform, an air bag, M sets of electric supporting height adjusting devices, an electronic level meter and a controller. The center of the leveling platform is supported on the base through the air bag, the M sets of the electric supporting height adjusting devices are distributed on the periphery of the air bag, the servo-type electronic level meter is mounted on the reference face of the leveling platform, the controller controls the M sets of the electric supporting height adjusting devices to adjust own supporting height according to data measured by the electronic level meter, and thus the dynamic high-precision adjustment of the levelness of the leveling platform is achieved. The servo-type heavy-load ultraprecise air bag supporting electric leveling system and the leveling method thereof are used for the leveling platform.

Description

technical field [0001] The invention relates to a servo-type heavy-load ultra-precision airbag supporting electric leveling system and an adjustment method thereof, belonging to the technical field of ultra-precision instrument and equipment platforms. Background technique [0002] Leveling platforms are widely used to support and install high-precision measuring instruments, manufacturing equipment, experimental systems, etc. [0003] Traditional leveling platforms perform static or quasi-static adjustments to the levelness of the load reference plane. When the distribution of the center of mass of the load of the leveling platform changes dynamically or when the supporting base thereof is disturbed to generate a dynamic displacement, the levelness of the leveling platform also presents a dynamic change. Static or quasi-static leveling platforms are difficult to adapt to the working conditions where the level needs to be dynamically adjusted. [0004] The dynamic leveling...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D3/12
Inventor 刘延芳陈学生齐冀齐乃明周文勇
Owner HARBIN INST OF TECH
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