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Cross-sectional dilation mode resonators and resonator-based ladder filters

A ladder filter, resonator technology, applied in impedance networks, electrical components, etc., can solve problems such as limiting the performance of conventional resonators

Active Publication Date: 2014-06-11
SNAPTRACK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, conventional FBARs are typically able to provide only one resonant frequency per wafer or die, for example, to act as the center frequency of a filter
These various factors can limit the performance of conventional resonators in multi-frequency broadband filter applications such as multi-band / multi-mode wireless communication circuits

Method used

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  • Cross-sectional dilation mode resonators and resonator-based ladder filters
  • Cross-sectional dilation mode resonators and resonator-based ladder filters
  • Cross-sectional dilation mode resonators and resonator-based ladder filters

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Embodiment Construction

[0068] The following detailed description is directed to certain implementations for the purpose of describing the innovative aspects. However, the teachings herein can be applied in a variety of different ways.

[0069] The disclosed implementations include examples of structures and configurations of electromechanical systems resonator devices, including dilation mode resonators (DMRs). Related equipment, systems, and manufacturing processes and technologies are also disclosed. Some examples of the disclosed DMRs have two-dimensional (2D) modes of vibration in cross-section of the resonator structure in which displacement and deformation occur along the thickness of the resonator and along the width or length of the resonator, as described in more detail below. Other examples of the disclosed DMRs have three-dimensional (3D) modes of vibration in which displacement and deformation occur along both the thickness-width and thickness-length cross-sections of the resonator stru...

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Abstract

Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T / D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and / or shunt elements, and the resonators can have spiral configurations.

Description

[0001] priority data [0002] This application is claimed in co-pending U.S. Provisional Patent Application No. 61 / 541,546, filed September 30, 2011, and entitled "CROSS-SECTIONAL DILATION MODE RESONATORS" (Attorney Docket No. No. 13 / for QUALP096P / 112736P1) and filed on November 14, 2011, entitled "CROSS-SECTIONAL DILATION MODE RESONATORS AND RESONATOR-BASED LADDER FILTERS" Priority of US Patent Application No. 295,978 (Attorney Docket No. QUALP096B / 112736U2). The disclosures of these prior applications are considered part of the present invention and are hereby incorporated by reference in their entirety and for all purposes. technical field [0003] The present invention relates generally to resonators, and more specifically, to electromechanical systems piezoelectric resonators and circuit topologies. Background technique [0004] Electromechanical systems (EMS) include devices having electrical and mechanical elements, actuators, transducers, sensors, optical compone...

Claims

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Application Information

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IPC IPC(8): H03H9/46H03H9/02H03H9/24
CPCH03H2009/241H03H9/2405H03H9/2426H03H9/462H03H2009/02503H03H9/02228H03H9/02H03H9/24H03H9/46
Inventor 左诚杰长汉·运智升·罗卫斯里·纳桑尼尔·艾伦马里奥·弗朗西斯科·韦莱兹龙海·金周山虎
Owner SNAPTRACK