Laser confocal Brillouin-Raman spectroscopy measurement method and device
A Raman spectroscopy and measurement device technology, applied in the field of laser confocal Brillouin-Raman spectroscopy measurement methods and devices, can solve problems such as limited application and difficulty in improving spatial resolution, and achieve high spatial resolution spectroscopy The effect of probing and facilitating comprehensive testing
Active Publication Date: 2016-08-17
BEIJING INSTITUTE OF TECHNOLOGYGY
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[0007] The purpose of the present invention is to propose a laser confocal Brillouin-Raman spectroscopy measurement method and device in order to overcome the shortcomings of the existing confocal Raman spectroscopy detection technology that the spatial resolution is difficult to improve and the application is limited
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[0061] In this embodiment, the first spectroscopic system 2 is a polarizing spectroscopic prism, the three-dimensional scanning system 5 is a three-dimensional scanning workbench, the dichroic spectroscopic system 6 is a Notch filter, the second spectroscopic system 8 is a spectroscope, and the Brillouin spectrometer 28 is In the F-P interferometer, the third beam splitting system 36 is a polarization maintaining beam splitting prism, the fourth beam splitting system 38 is a broadband beam splitting prism, and the fourth detector 41 is a CCD.
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The invention belongs to the technical field of microscopic imaging and spectral measurement and relates to a high resolution spectral imaging and detection method and apparatus which combine confocal microscopic technology and spectral detection technology together, realize integration of images and spectrums and are used for three dimensional morphology reconstruction and micro-area morphological performance parameter measurement of a variety of samples. The method and apparatus utilize Rayleigh light abandoned by a traditional confocal Raman system and confocal technology for detection of the position of a sample, employs a spectral detection system for spectral detection and uses Brillouin diffusion light abandoned by a traditional confocal Raman detection technology to test properties like elasticity and piezoelectricity of a material, thereby realizing measurement of micro-area high spatial resolution morphological parameters of a sample. The method and apparatus provided by the invention have the advantages of accurate positioning, high spatial resolution, high spectral detection sensitivity, controllable measured spot size, etc. and have wide application prospects in fields like biomedicine, evidence collection of court, micro and nano-fabrication, material engineering, engineering physics, precise metering and physical chemistry.
Description
technical field [0001] The invention belongs to the field of micro-spectral imaging technology, combines confocal microscopic technology and spectral detection technology, and relates to a laser confocal Brillouin-Raman spectral measurement method and device, which can be used for comprehensive testing of micro-area morphological performance parameters of samples with high-resolution imaging. technical background [0002] Laser confocal Raman spectroscopy testing technology is a new technology that combines microscopic analysis technology and Raman spectroscopy analysis technology. It focuses the incident laser light on the sample through the microscope, so that it can obtain The molecular structure and so on of the illuminated sample micro-area are called molecular probes. It can not only observe the Raman spectrum signals of different micro-regions in the same layer of the sample, but also observe the Raman signals of different layers in the sample at different depths, an...
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IPC IPC(8): G01N21/65
Inventor 赵维谦邱丽荣盛忠王允
Owner BEIJING INSTITUTE OF TECHNOLOGYGY